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Armen Avoyan

Lam Research

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Publication

Featured researches published by Armen Avoyan.

Archive | 2003

Method for toolmatching and troubleshooting a plasma processing system

Armen Avoyan; Seyed Jafar Jafarian-Tehrani

Archive | 2004

WET CLEANING OF ELECTROSTATIC CHUCKS

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Archive | 2007

Methodology for cleaning of surface metal contamination from electrode assemblies

Hong Shih; Yaobo Yin; Shun Jackson Wu; Armen Avoyan; John Daugherty; Linda Jiang

Archive | 2011

Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

Hong Shih; Yaobo Yin; Jason Augustino; Catherine Zhou; Armen Avoyan

Archive | 2011

Dual Phase Cleaning Chambers and Assemblies Comprising The Same

Armen Avoyan; Cliff La Croix; Hong Shih

Archive | 2008

Processes for reconditioning multi-component electrodes

Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten

Archive | 2009

Immersive oxidation and etching process for cleaning silicon electrodes

Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih

Archive | 2008

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME

Jason Augustino; Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten

Archive | 2007

Cleaning of bonded silicon electrodes

Duane Outka; Jason Augustino; Armen Avoyan; Stephen Whitten; Hong Shih; Yan Fang

Archive | 2008

Peripherally engaging electrode carriers and assemblies incorporating the same

Jason Augustino; Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten

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Collaboration

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Hong Shih

Lam Research

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Duane Outka

Lam Research

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Catherine Zhou

Lam Research

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John Daugherty

Lam Research

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Cliff La Croix

Lam Research

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Seyed Jafar Jafarian-Tehrani

Lam Research

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Yan Fang

Lam Research

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Brian Mcmillin

Lam Research

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Cliff LaCroix

Lam Research

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Jason Augustino

Lam Research

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