Is this you? Create Your Porfile
Avatar

Catherine Zhou

Lam Research

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Catherine Zhou is active.

Explore More

Publication

Featured researches published by Catherine Zhou.

Archive | 2004

WET CLEANING OF ELECTROSTATIC CHUCKS

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Archive | 2005

Methods for silicon electrode assembly etch rate and etch uniformity recovery

Tuochuan Huang; Daxing Ren; Hong Shih; Catherine Zhou; Chun Yan; Enrico Magni; Bi Ming Yen; Jerome S. Hubacek; Dae J. Lim; Dougyong Sung

Archive | 2011

Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

Hong Shih; Yaobo Yin; Jason Augustino; Catherine Zhou; Armen Avoyan

Archive | 2009

Immersive oxidation and etching process for cleaning silicon electrodes

Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih

Archive | 2009

Platen and adapter assemblies for facilitating silicon electrode polishing

Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih

Archive | 2010

Electrode securing platens and electrode polishing assemblies incorporating the same

Cliff La Croix; Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih

Archive | 2012

SYSTEM AND METHOD FOR CLEANING GAS INJECTORS

Armen Avoyan; Cliff La Croix; Hong Shih; Allan Ronne; John Daugherty; Catherine Zhou

Archive | 2013

Adapter plate for polishing and cleaning electrodes

Catherine Zhou; Duane Outka; Cliff LaCroix; Hong Shih

Archive | 2011

Electrode Carrier Assemblies

Cliff La Croix; Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih

Archive | 2005

Nettoyage par voie humide pour mandrins electrostatiques

Hong Shih; Tuochuan Huang; Catherine Zhou; Bruno Morel; Brian Mcmillin; Paul Mulgrew; Armen Avoyan

Explore More

Collaboration

Dive into the Catherine Zhou's collaboration.

Top Co-Authors
Avatar

Hong Shih

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Armen Avoyan

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Duane Outka

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Tuochuan Huang

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Brian Mcmillin

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Bruno Morel

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Cliff La Croix

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Paul Mulgrew

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Bi Ming Yen

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Chun Yan

Lam Research

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge