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Arthur H. Sato

Applied Materials

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Publication

Featured researches published by Arthur H. Sato.

Archive | 1995

Inductively coupled plasma reactor with an inductive coil antenna having independent loops

Arthur H. Sato; Xue-Yu Qian

Archive | 2000

Pulsed RF power delivery for plasma processing

Jin-Yuan Chen; John Holland; Arthur H. Sato; Valentin N. Todorow

Archive | 1995

Plasma reactors for processing semi-conductor wafers

Xue-Yu Qian; Arthur H. Sato

Archive | 1998

Plasma assisted processing chamber with separate control of species density

Gerald Zheyao Yin; Arnold Kolandenko; Hong Ching Shan; Peter K. Loewenhardt; Chii Lee; Yan Ye; Xueyan Qian; Songlin Xu; Arthur Y. Chen; Arthur H. Sato; Michael N. Grimbergen; Diana Ma; John M. Yamartino; Chun Yan; Wade Zawalski

Archive | 2000

Plasma reactor with dynamic RF inductive and capacitive coupling control

Xue-Yu Qian; Zhiwen Sun; Maocheng Li; John Holland; Arthur H. Sato; Valentin N. Todorov; Patrick Leahey; Robert E. Ryan

Archive | 1999

Capacitive probe for in situ measurement of wafer DC bias voltage

Peter K. Loewenhardt; Arthur H. Sato; Valentin N. Todorov

Archive | 1996

Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor

Xue-Yu Qian; Arthur H. Sato

Archive | 1995

Plasma reactor with a segmented balanced electrode for sputtering process materials from a target surface

Xue Y. Qian; Arthur H. Sato

Archive | 1995

Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling

Xue-Yu Qian; Arthur H. Sato

Archive | 1996

Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same

Valentin N. Todorov; Yoshi Tanase; Xue-Yu Qian; Arthur H. Sato; Peter K. Loewenhardt; Yan Ye; Shaoher X. Pan; Dragan Podlesnik

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Xue-Yu Qian

Applied Materials

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Valentin N. Todorov

Applied Materials

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Jin-Yuan Chen

Applied Materials

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Peter K. Loewenhardt

Applied Materials

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John Holland

Applied Materials

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Robert E. Ryan

Applied Materials

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Zhiwen Sun

Applied Materials

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Ajay Kumar

Applied Materials

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Anisul Khan

Applied Materials

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Dragan Podlesnik

Applied Materials

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