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Valentin N. Todorov

Applied Materials

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Publication

Featured researches published by Valentin N. Todorov.

Archive | 2001

Method for controlling etch uniformity

Michael Barnes; John Holland; Valentin N. Todorov; Mohit Jain; Alexander Paterson

Archive | 2002

Tandem etch chamber plasma processing system

Alexander Paterson; Valentin N. Todorov; Jon M. Mcchesney; Gerhard Schneider; David Palagashvili; John Holland; Michael Barnes

Archive | 2001

Adjustable dual frequency voltage dividing plasma reactor

Michael Barnes; John Holland; Alexander Paterson; Valentin N. Todorov; Farhad Moghadam

Archive | 2007

Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system

Thai Cheng Chua; Steven Hung; Patricia M. Liu; Tatsuya E. Sato; Alex Paterson; Valentin N. Todorov; John Holland

Archive | 2000

Plasma reactor with dynamic RF inductive and capacitive coupling control

Xue-Yu Qian; Zhiwen Sun; Maocheng Li; John Holland; Arthur H. Sato; Valentin N. Todorov; Patrick Leahey; Robert E. Ryan

Archive | 1999

Capacitive probe for in situ measurement of wafer DC bias voltage

Peter K. Loewenhardt; Arthur H. Sato; Valentin N. Todorov

Archive | 2007

PULSED-PLASMA SYSTEM WITH PULSED SAMPLE BIAS FOR ETCHING SEMICONDUCTOR SUBSTRATES

Tae Won Kim; Kyeong-Tae Lee; Alexander Paterson; Valentin N. Todorov; Shashank C. Deshmukh

Archive | 2000

Inductively coupled plasma source with controllable power deposition

Michael Barnes; John Holland; Valentin N. Todorov

Archive | 2001

Icp window heater integrated with faraday shield or floating electrode between the source power coil and the icp window

Maocheng Li; John Holland; Valentin N. Todorov; Patrick Leahey; Robert P. Hartlage; Hoan Hai Nguyen

Archive | 1996

Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same

Valentin N. Todorov; Yoshi Tanase; Xue-Yu Qian; Arthur H. Sato; Peter K. Loewenhardt; Yan Ye; Shaoher X. Pan; Dragan Podlesnik

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John Holland

Applied Materials

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Alexander Paterson

Applied Materials

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Arthur H. Sato

Applied Materials

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Michael Barnes

Lam Research

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David Palagashvili

Applied Materials

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Gerhard Schneider

Applied Materials

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Hiroji Hanawa

Applied Materials

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Padmapani C. Nallan

Applied Materials

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Thorsten Lill

Applied Materials

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Xue-Yu Qian

Applied Materials

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