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Atsuko Kubota

Toshiba

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Publication

Featured researches published by Atsuko Kubota.

Archive | 1994

Process for producing Semiconductor silicon wafer

Atsuko Kubota; Masakatu Kojima; Norihiko Tsuchiya; Shuichi Samata; Masanori Numano; Yoshihiro Ueno

Archive | 1995

Semiconductor silicon wafer and process for producing it

Atsuko Kubota; Masakatu Kojima; Norihiko Tsuchiya; Shuichi Samata; Masanori Numano; Yoshihiro Ueno

Archive | 1988

Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface

Yoshiaki Matsushita; Moriya Miyashita; Makiko Wakatsuki; Norihiko Tsuchiya; Atsuko Kubota

Archive | 1993

Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate

Moriya Miyashita; Hachiro Hiratsuka; Atsuko Kubota; Shuichi Samata; Masanori Numano; Hiroyuki Fukui

Archive | 1987

Method for predicting density of micro crystal defects in semiconductor element from silicon wafer used in the manufacture of the element, and infrared absorption measurement apparatus for this method

Atsuko Kubota; Yoshiaki Matsushita; Yoshiaki Ohwada

Archive | 1991

SYSTEM FOR ANALYZING METAL IMPURITY ON THE SURFACE OF A SINGLE CRYSTAL SEMICONDUCTOR BY USING TOTAL REFLECTION OF X-RAYS FLUORESCENCE

Atsuko Kubota; Norihiko Tsuchiya; Shuichi Samata; Yoshiaki Matsushita; Mokuji Kageyama

Archive | 1996

APPARATUS AND METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE

Mokuji Kageyama; Atsuko Kubota; Hiroshi Matsushita; Norihiko Tsuchiya

Archive | 1995

Semiconductor silicon wafer and its manufacture

Masakatsu Kojima; Atsuko Kubota; Masakuni Numano; Shuichi Samata; Norihiko Tsuchiya; Yoshihiro Ueno

Archive | 1994

Process for producing a semiconductor silicon wafer

Masakatsu Kojima; Atsuko Kubota; Numano Masanori; Shuichi Samata; Norihiko Tsuchiya; Yoshihiro Ueno

The Japan Society of Applied Physics | 1990

Nondestructive Evaluation of Trace Metals and Application to Defect Generation

N. Tsuchiya; M. Tanaka; Mokuji Kageyama; Atsuko Kubota; Yoshiaki Matsushita

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Norihiko Tsuchiya

Toshiba

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Shuichi Samata

Toshiba

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Yoshiaki Matsushita

Tokyo Institute of Technology

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Yoshihiro Ueno

Toshiba

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Masakatsu Kojima

Toshiba

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Mokuji Kageyama

Toshiba

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Moriya Miyashita

Toshiba

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Numano Masanori

Toshiba

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Makiko Wakatsuki

Toshiba

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Masanori Numano

Toshiba

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