Atsuko Kubota

Process for producing Semiconductor silicon wafer

Semiconductor silicon wafer and process for producing it

Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface

Semiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrate

Method for predicting density of micro crystal defects in semiconductor element from silicon wafer used in the manufacture of the element, and infrared absorption measurement apparatus for this method

SYSTEM FOR ANALYZING METAL IMPURITY ON THE SURFACE OF A SINGLE CRYSTAL SEMICONDUCTOR BY USING TOTAL REFLECTION OF X-RAYS FLUORESCENCE

APPARATUS AND METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE

Semiconductor silicon wafer and its manufacture

Process for producing a semiconductor silicon wafer

Nondestructive Evaluation of Trace Metals and Application to Defect Generation