Mokuji Kageyama
Toshiba
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Publication
Featured researches published by Mokuji Kageyama.
The Japan Society of Applied Physics | 1994
Mokuji Kageyama; Moriya Miyashita; Hiroyasu Kubota
A new wet cleaning method using pure water and ultraviolet light has been investigated. This method, the PWruV cleaning, is simply irradiating a pure water coated silicon wafer with ultraviolet light. The metal removal efficiency was evaluated for transition metals adsorbed on hydrophilic surface and copper deposited on hydrophobic surface. It was found that the PWUV cleaning has high efficiency for metal removal without any reactive chemicals and gases
Archive | 1989
Ayako Maeda; Mokuji Kageyama; Shintaro Yoshii; Masanobu Ogino
Archive | 1992
Moriya Miyashita; Mokuji Kageyama; Hachiro Hiratsuka
Archive | 1993
Mokuji Kageyama; Kiyoshi Yoshikawa; Ayako Shimazaki
Archive | 1995
Mokuji Kageyama; Moriya Miyashita
Archive | 1991
Atsuko Kubota; Norihiko Tsuchiya; Shuichi Samata; Yoshiaki Matsushita; Mokuji Kageyama
Archive | 1999
Shoko Ito; Mokuji Kageyama
Archive | 1996
Mokuji Kageyama; Atsuko Kubota; Hiroshi Matsushita; Norihiko Tsuchiya
Archive | 1989
Mokuji Kageyama; Ayako Maeda
The Japan Society of Applied Physics | 1990
N. Tsuchiya; M. Tanaka; Mokuji Kageyama; Atsuko Kubota; Yoshiaki Matsushita
