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Bill H. Quon

Tokyo Electron

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Publication

Featured researches published by Bill H. Quon.

Archive | 2004

Method and apparatus for processing a workpiece with a plasma

Bill H. Quon

Archive | 2004

Method and apparatus for improved plasma processing uniformity

Andrej S. Mitrovic; Eric J. Strang; Murray D. Sirkis; Bill H. Quon; Richard Parsons; Yuji Tsukamoto

Archive | 2003

Closed-drift hall effect plasma vacuum pump for process reactors

Bill H. Quon; Samuel S. Antley; Andrej S. Mitrovic

Archive | 2002

Inductively coupled high-density plasma source

Bill H. Quon; Jovan Jevtic; Sam Antley; Eric J. Strang

Archive | 2007

Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube

Paul Moroz; Bill H. Quon; Samuel S. Antley; Janusz Sosnowski

Archive | 2002

Applied plasma duct system

Raphael A. Dandl; Bill H. Quon; Samuel S. Antley; Andrej S. Mitrovic; Wayne L. Johnson

Archive | 2002

Stand alone plasma vacuum pump

Raphael A. Dandl; Bill H. Quon

Archive | 2002

Apparatus and method for improving electron ecceleration

Bill H. Quon; Jovan Jevtic; Thomas H. Windhorn; Wayne L. Johnson

Archive | 2003

Non-linear test load and method of calibrating a plasma system

Bill H. Quon; Richard Parsons

Archive | 2005

Temperature control of plasma density probe

Andrej S. Mitrovic; Samuel S. Antley; Bill H. Quon

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Andrej S. Mitrovic

Tokyo Electron

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Samuel S. Antley

Tokyo Electron

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Wayne L. Johnson

Tokyo Electron

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Eric J. Strang

Tokyo Electron

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Jovan Jevtic

Tokyo Electron

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Raphael A. Dandl

Tokyo Electron

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Richard Parsons

Tokyo Electron

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Murray D. Sirkis

Tokyo Electron

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Yuji Tsukamoto

Tokyo Electron

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