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Murray D. Sirkis

Tokyo Electron

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Publication

Featured researches published by Murray D. Sirkis.

Archive | 2002

Method and system for reducing damage to substrates during plasma processing with a resonator source

Wayne L. Johnson; Murray D. Sirkis

Archive | 2001

Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer

Medona B. Denton; Wayne L. Johnson; Murray D. Sirkis

Archive | 2004

Method and apparatus for improved plasma processing uniformity

Andrej S. Mitrovic; Eric J. Strang; Murray D. Sirkis; Bill H. Quon; Richard Parsons; Yuji Tsukamoto

Archive | 2000

Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator

Joseph T. Verdeyen; Wayne L. Johnson; Murray D. Sirkis

Archive | 2000

Stabilized oscillator circuit for plasma density measurement

Murray D. Sirkis; Joseph T. Verdeyen

Archive | 2000

Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma

Joseph T. Verdeyen; Wayne L. Johnson; Murray D. Sirkis

Archive | 2003

Addition of power at selected harmonics of plasma processor drive frequency

Andrej S. Mitrovic; Jovan Jevtic; Richard Parsons; Murray D. Sirkis

Archive | 2000

Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma

Joseph T. Verdeyen; Wayne L. Johnson; Murray D. Sirkis

Archive | 2003

Electrode apparatus and method for plasma processing

Murray D. Sirkis; Wayne L. Johnson; Steven T. Fink

Archive | 2003

Automated electrode replacement apparatus for a plasma processing system

Murray D. Sirkis; Eric J. Strang; Yu Wang Bibby; John Edward Cronin

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Collaboration

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Wayne L. Johnson

Tokyo Electron

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Joseph T. Verdeyen

Tokyo Electron

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Eric J. Strang

Tokyo Electron

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Andrej S. Mitrovic

Tokyo Electron

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Richard Parsons

Tokyo Electron

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Bill H. Quon

Tokyo Electron

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Jovan Jevtic

Tokyo Electron

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Steven T. Fink

Tokyo Electron

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Yuji Tsukamoto

Tokyo Electron

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