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Eric J. Strang

Tokyo Electron

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Publication

Featured researches published by Eric J. Strang.

Archive | 2002

Method of and apparatus for tunable gas injection in a plasma processing system

Eric J. Strang

Archive | 2000

Multi-zone resistance heater

Wayne L. Johnson; Eric J. Strang

Archive | 2006

Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system

Yuji Tsukamoto; Eric J. Strang

Archive | 2003

System and method for using first-principles simulation to control a semiconductor manufacturing process

Eric J. Strang; Andrej S. Mitrovic

Archive | 2007

Apparatus and method of gas injection sequencing

Eric J. Strang

Archive | 2003

Thermally zoned substrate holder assembly

Steven T. Fink; Eric J. Strang

Archive | 2004

Method and apparatus for improved plasma processing uniformity

Andrej S. Mitrovic; Eric J. Strang; Murray D. Sirkis; Bill H. Quon; Richard Parsons; Yuji Tsukamoto

Archive | 2003

Method and system for arc suppression in a plasma processing system

Paul Moroz; Eric J. Strang

Archive | 2003

System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process

Andrej S. Mitrovic; Eric J. Strang

Archive | 2002

Monitoring material buildup on system components by optical emission

Audunn Ludviksson; Eric J. Strang

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Collaboration

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Andrej S. Mitrovic

Tokyo Electron

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Wayne L. Johnson

Tokyo Electron

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Steven T. Fink

Tokyo Electron

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Martin Kent

Tokyo Electron

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Murray D. Sirkis

Tokyo Electron

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Audunn Ludviksson

Tokyo Electron

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Bill H. Quon

Tokyo Electron

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Eric M. Lee

Tokyo Electron

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Jacques Faguet

Tokyo Electron

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Paul Moroz

Tokyo Electron

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