Andrej S. Mitrovic | Researchain

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Publication

Featured researches published by Andrej S. Mitrovic.

Archive | 2003

System and method for using first-principles simulation to control a semiconductor manufacturing process

Eric J. Strang; Andrej S. Mitrovic

Archive | 2004

Method and apparatus for improved plasma processing uniformity

Andrej S. Mitrovic; Eric J. Strang; Murray D. Sirkis; Bill H. Quon; Richard Parsons; Yuji Tsukamoto

Archive | 2002

Segmented electrode apparatus and method for plasma processing

Andrej S. Mitrovic; Wayne L. Johnson

Archive | 2003

System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process

Andrej S. Mitrovic; Eric J. Strang

Archive | 2001

Method of and structure for controlling electrode temperature

Eric J. Strang; Andrej S. Mitrovic; Jim N. Fordemwalt; Wayne L. Johnson

Archive | 2003

System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool

Eric J. Strang; Andrej S. Mitrovic

Archive | 2002

Segmented electrode apparatus for plasma processing

Andrej S. Mitrovic; Wayne L. Johnson

Archive | 2005

Apparatus and method for use of optical system with a plasma processing system

Andrej S. Mitrovic; Audunn Ludviksson

Archive | 2004

Method and system for temperature control of a substrate

Andrej S. Mitrovic; Yuji Tsukamoto

Archive | 2002

Optical system and method for plasma optical emission analysis

Andrej S. Mitrovic

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Collaboration

Dive into the Andrej S. Mitrovic's collaboration.

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Eric J. Strang

Tokyo Electron

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Wayne L. Johnson

Tokyo Electron

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Audunn Ludviksson

Tokyo Electron

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Bill H. Quon

Tokyo Electron

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Jovan Jevtic

Tokyo Electron

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Murray D. Sirkis

Tokyo Electron

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Paula Calabrese

Tokyo Electron

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Samuel S. Antley

Tokyo Electron

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Steven T. Fink

Tokyo Electron

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William D. Jones

Tokyo Electron

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