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Arthur M. Howald

Lam Research

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Publication

Featured researches published by Arthur M. Howald.

Archive | 1998

Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors

Arthur M. Howald; John Patrick Holland

Archive | 2004

Apparatus and methods for improving the stability of RF power delivery to a plasma load

Arthur M. Howald; Andras Kuthi; Andrew D. Bailey

Archive | 1998

Methods for controlling an RF matching network

Arthur M. Howald

Archive | 2002

Plasma excitation coil

Arthur M. Howald; Brian Mcmillin; Frank Y. Lin

Archive | 2006

Processes and Systems for Engineering a Barrier Surface for Copper Deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; William Thie; Arthur M. Howald

Archive | 2002

Plasma processor apparatus and method, and antenna

Arthur M. Howald; Andras Kuthi

Archive | 2002

System and method for dechucking a workpiece from an electrostatic chuck

Arthur M. Howald

Archive | 2000

Plasma processing method and apparatus with control of rf bias

Arthur M. Howald; John Patrick Holland; Christopher Olson

Archive | 2004

Dechucking method and apparatus for workpieces in vacuum processors

Arthur M. Howald; John Patrick Holland

Archive | 2007

Method of determining the correct average bias compensation voltage during a plasma process

Arthur M. Howald

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Andrew D. Bailey

Lam Research

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John C. Valcore

Lam Research

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Yezdi Dordi

Lam Research

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Fritz C. Redeker

Lam Research

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John M. Boyd

Lam Research

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John Patrick Holland

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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William Thie

Lam Research

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Andras Kuthi

Lam Research

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Alan M. Schoepp

Lam Research

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