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Andras Kuthi

Lam Research

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Publication

Featured researches published by Andras Kuthi.

Archive | 1996

Plasma processing systems

Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson; Andras Kuthi

Archive | 2002

Plasma processor with electrode simultaneously responsive to plural frequencies

Vahid Vahedi; Peter Loewenhardt; Albert Ellingboe; Andras Kuthi; Andreas Fischer

Archive | 2007

Bevel etcher with gap control

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; Andras Kuthi; Yunsang Kim; William S. Kennedy

Archive | 2004

Apparatus and methods for improving the stability of RF power delivery to a plasma load

Arthur M. Howald; Andras Kuthi; Andrew D. Bailey

Archive | 1998

Semiconductor process chamber electrode

Andras Kuthi; Lumin Li

Archive | 2000

Method and apparatus for producing uniform process rates

Andrew D. Bailey; Alan M. Schoepp; Andras Kuthi

Archive | 2001

Temperature control system for plasma processing apparatus

Andrew D. Bailey; Alan M. Schoepp; Michael G. R. Smith; Andras Kuthi

Archive | 2002

Plasma processor apparatus and method, and antenna

Arthur M. Howald; Andras Kuthi

Archive | 2001

System, apparatus, and method for processing wafer using single frequency RF power in plasma processing chamber

Andras Kuthi; Andreas Fischer

Archive | 2003

Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator

Neil Benjamin; Andras Kuthi

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Andrew D. Bailey

Lam Research

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Alan M. Schoepp

Lam Research

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Andreas Fischer

Lam Research

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Gregory Sexton

Lam Research

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Arthur M. Howald

Lam Research

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Michael G. R. Smith

Lam Research

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John M. Boyd

Lam Research

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Thomas W. Anderson

Lam Research

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Yunsang Kim

Lam Research

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Babak Kadkhodayan

Lam Research

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