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Dive into the research topics where Byoung-Ho Kwon is active.

Publication


Featured researches published by Byoung-Ho Kwon.


symposium on vlsi technology | 2008

Vertical Structure NAND flash array integration with paired FinFET multi-bit scheme for high-density NAND flash memory application

June-mo Koo; Tae-eung Yoon; Tae-Hee Lee; Sung-jae Byun; Young-Gu Jin; Won-joo Kim; Suk-pil Kim; Jong-Bong Park; Jun-Seok Cho; Jeong-Dong Choe; Choong-ho Lee; Jong Jin Lee; Je-Woo Han; Y. M. Kang; Sangjun Park; Byoung-Ho Kwon; Yong-Ju Jung; Inkyoung Yoo; Yoon-dong Park

Multi-bit vertical structure NAND (VsNAND) flash memories with 32-paired FinFET cell string have been successfully integrated for the first time. Its array integration issues regarding the sub-10 nm vertical structure fin could be solved by proper choices of isolation material, ion implantation, and word line patterning. VsNAND flash array cells with TANOS (TaN/Al2O3/SiN/SiOx/Si) charge trap structure show possibilities of acceptable program/erase properties and cell Vth distribution characteristics for multi-level NAND flash application.


Archive | 2006

Method of forming self-aligned double pattern

Byoung-Ho Kwon; Se-rah Yun; Chang-ki Hong; Bo-Un Yoon; Jae-Kwang Choi; Joon-Sang Park


Archive | 2008

Semiconductor device including dummy gate part and method of fabricating the same

Byoung-Ho Kwon; Sang-youn Jo; Jin-Sook Choi; Chang-ki Hong; Bo-Un Yoon; Hong-Soo Kim; Se-rah Yun


Archive | 2010

METHODS OF MANUFACTURING SEMICONDUCTORS USING DUMMY PATTERNS

Byoung-Ho Kwon; Bo-Un Yoon; Min-Sang Kim


Archive | 2011

CHEMICAL MECHANICAL POLISHING APPARATUS HAVING PAD CONDITIONING DISK AND PRE-CONDITIONER UNIT

Jae-Kwang Choi; Hongjin Kim; Keon-Sik Seo; Sol Han; Kun-tack Lee; Byoung-Ho Kwon


Archive | 2009

Method of Fabricating Non-Volatile Memory Integrated Circuit Device and Non-Volatile Memory Integrated Circuit Device Fabricated Using the Same

Byoung-Ho Kwon; Chang-ki Hong; Bo-Un Yoon; Jun-Yong Kim


Archive | 2011

Photo key and method of fabricating semiconductor device using the photo key

Byoung-Ho Kwon; Chang-ki Hong; Bo-Un Yoon; Jae-dong Lee; Sang-Jin Kim


Archive | 2013

ETCHING COMPOSITION AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

Sang Won Bae; Yong-Sun Ko; Byoung-Ho Kwon; Bo yun Kim; Hongjin Kim; Sungoh Park; Kun-tack Lee; Hyo-san Lee; Sol Han


Archive | 2011

Conductive structure and integrated circuit assembly

Byoung-Ho Kwon; Bo-Un Yoon


Archive | 2010

LOW-RESISTANCE CONDUCTIVE PATTERN STRUCTURES AND METHODS OF FABRICATING THE SAME

Byoung-Ho Kwon; Bo-Un Yoon

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