C. Hibert
École Polytechnique Fédérale de Lausanne
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Publication
Featured researches published by C. Hibert.
international symposium on quality electronic design | 2002
Adrian M. Ionescu; Vincent Pott; R. Fritschi; Kaustav Banerjee; M. Declercq; Philippe Renaud; C. Hibert; Philippe Flückiger; Georges A. Racine
A novel MEMS device architecture: the SOI SG-MOSFET, which combines a solid-state MOS transistor and a suspended metal membrane in a unique metal-over-gate architecture, is proposed. A unified physical analytical model (weak, moderate and strong inversions) is developed and used to investigate main electrostatic characteristics in order to provide first-order design criteria for low-voltage operation and high-performance. It is demonstrated that the use of a thin gate oxide (<20 nm) is essential for a high C/sub on//C/sub off/ ratio (>100) and a low spring constant (<100 N/m) is needed for low voltage (<5 V) actuation. An adapted fabrication process is reported.
international conference on micro electro mechanical systems | 2003
S. Frederico; C. Hibert; R. Fritschi; Ph. Flückiger; Philippe Renaud; Adrian M. Ionescu
A novel Silicon Sacrificial Layer Dry Etching (SSLDE) technique using sputtered amorphous or LPCVD polycrystalline silicon as sacrificial layers and a dry fluorine-based (SF/sub 6/) plasma chemistry as releasing process is reported with a detailed experimental study of the release etching step. The process is capable of various applications in surface micromachining process, and can be applied in fabricating RF MEMS switches, tunable capacitors, high-Q suspended inductors and suspended-gate MOSFETs. The developed SSLDE process can release metal suspended beams and membranes with excellent performance in terms of etch rate (up to 15 /spl mu/m/min), Si:SiO/sub 2/ selectivity and is fully compatible with standard MEMS processing equipment and CMOS post-processing.
Nanotechnology | 2008
Sivashankar Krishnamoorthy; Y Gerbig; C. Hibert; Raphaël Pugin; Christian Hinderling; Jürgen Brugger; Harry Heinzelmann
We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, silicon oxide, silicon nitride and quartz. The promise of the approach as a versatile application oriented platform is highlighted by demonstrating its utility for creating super-hydrophobic surfaces, fabrication of nanoporous polymeric membranes, and controlling the areal density of physical vapor deposition derived titanium nitride nanostructures.
international conference on micro electro mechanical systems | 2004
M. Pavius; C. Hibert; Ph. Flückiger; Philippe Renaud; L. Rolland; M. Puech
We report a recent breakthrough to control profile angle for SiO/sub 2/ deep anisotropic dry etching (SDADE). Our study reveals that gas residence time is the key parameter to control profile angle. Moreover, we show that it is possible to control profile angle, SiO/sub 2/ etch rate and SiO/sub 2/ selectivity to Si mask independently. Finally, the optimized process has the following performances: angle profile: 89.8/spl deg/, SiO/sub 2/ etch rate: 500 nm/min, selectivity: 18:1.
international semiconductor conference | 2001
Vincent Pott; Adrian M. Ionescu; R. Fritschi; C. Hibert; Philippe Flückiger; M. Declercq; P. Renaud; Alexandru Rusu; D. Dobrescu; Lidia Dobrescu
This paper reports on the modeling and key design aspects of an innovative MEMS device: the suspended-gate MOSFET (SG-MOSFET). Based on the coupled-electromechanical equations describing the suspended gate actuation, we present the investigation of the pull-in voltages and of the capacitance switching and tuning ranges for RF applications. A quasi-analytical model is developed for the gate-to-substrate capacitance of the SG-MOSFET and then, validated by numerical simulation. A SPICE macromodel using a polynomial voltage-controlled source is validated for the DC simulation of the SG-MOSFET. Guide lines for the low-voltage design of an SG-MOSFET RF switch are detailed.
conference of the industrial electronics society | 2002
R. Fritschi; Catherine Dehollain; M. Declercq; Adrian M. Ionescu; C. Hibert; Ph. Flückiger; Philippe Renaud
A novel MEMS technological platform for RF passive components, namely RF MEMS switches, tuneable capacitors and high-Q suspended inductors, is reported. The proposed process employs a metal (Al, AlSi or Cu) as active movable layer and amorphous silicon or polycrystalline silicon as sacrificial layers, providing multi-air-gaps. Various types of substrates like bulk silicon and SOI can be used. Full-dry releasing of suspended beams and membranes is performed with SF/sub 6/ or XeF/sub 2/, with unrivalled yield/reproducibility compared with any other wet etching techniques. The platform is used to validate new MEMS architectures and concepts, such as the suspended-gate MOSFET that can serve as both RF capacitive switches and tuneable RF capacitors.
european solid-state device research conference | 2006
Christine Leroy; Marcelo B. Pisani; R. Fritschi; C. Hibert; Adrian M. Ionescu
The paper proposes and validates a new doubly functional quartz wafer-level package concept for MEMS devices. In addition to the mechanical and environment protection, thick-Cu high-Q inductors for RF applications are made within the package processing. A double-side processing of a quartz wafer is reported. While the top side of the quartz is used to realize quartz-embedded horizontal plane Cu inductors, the bottom side is thermo-mechanically bonded on an active wafer using an SU8 photoepoxy semi-hermetic seal. A successful fabrication results in terms of very good adhesion of SU8 bonding, compatibility with fluorine plasma chemistry for MEMS release and very good RF performances (excellent quality factors, higher than 30 at 2 GHz, and self resonant frequency above 6 GHz) was demonstrated
international conference on micro electro mechanical systems | 2009
G. Villanueva; Oscar Vazquez-Mena; C. Hibert; Juergen Brugger
This paper reports the feasibility of the fabrication of high aspect ratio structures on substrates via dry etching through a stencil mask placed onto the sample. It demonstrates the possibility to use standard equipment and processes with this novel masking technique, which allows the patterning of fragile and pre-structured surfaces, and avoids the use of resist or additional coating of the sample, reducing costs and processing time. Aspect ratios as high as 13:1 and pattern transfer with a gap of 100 ¿m are demonstrated.
IEEE\/ASME Journal of Microelectromechanical Systems | 2011
Sertan Kutal Gokce; Sven Holmstrom; C. Hibert; Selim Olcer; David Bowman; Hakan Urey
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 μm out of plane and 34 μm in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Research in Microelectronics and Electronics, 2005 PhD | 2005
M.B. Pisani; C. Hibert; D. Bouvet; Catherine Dehollain; Adrian M. Ionescu
This paper presents fabrication and RF characterization results of spiral inductors fabricated using a developed damascene-like thick-copper/polyimide process module. This module has low thermal budget and is compatible with current IC interconnect architectures, making it suitable for CMOS above IC integration of high quality factor passive devices. Thick, high-conductive copper layers associated with low K polymers and high resistivity substrates can provide RF performances that cannot be achieved using conventional thin aluminum films on low-resistivity substrates. Peak quality factors of about 20 and exceeding 10 over a wide frequency range (1-6 GHz) are demonstrated, with a self-resonant frequency of about 10 GHz. Measurements and equivalent circuit extraction results are also presented and discussed.