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Featured researches published by Carole David.


international soi conference | 2009

SOI substrate readiness for 22/20 nm and for fully depleted planar device architectures

Daniel Delprat; François Boedt; Carole David; Patrick Reynaud; Aziz Alami-Idrissi; Didier Landru; Christophe Girard; Christophe Maleville

Fully depleted (FD) MOSFET architecture for sub-32 nm technology node requires a new SOI substrate fabrication to meet all the stringent specifications imposed by a FD device. Ultra Thin SOI (UTSOI) targets planar device architectures, stressing specifications for thickness uniformity. Also Ultra Thin Burried Oxyde (UTBOx) offers additional benefits such as the application of back bias, for example enhancing device stability or threshold voltage tuning. In this paper, we discuss the Smart CutTM technology capability for both UTSOI and UTBOx substrate design with the quality and specifications that meet the future FD technology requirements.


Archive | 2012

PROCESS FOR FABRICATING A SILICON-ON-INSULATOR STRUCTURE

Carole David; Sébastien Kerdiles


Archive | 2012

PROCESS FOR STABILIZING A BONDING INTERFACE, LOCATED WITHIN A STRUCTURE WHICH COMPRISES AN OXIDE LAYER AND STRUCTURE OBTAINED

Didier Landru; Carole David; Ionut Radu; Lucianna Capello; Yann Sinquin


Archive | 2016

METHOD OF MOVING LAYER FROM SINGLE CRYSTAL SUBSTRATE

Ecarnot Ludovic; Daval Nicolas; Nadia Ben Mohamed; François Boedt; Carole David; Isabell Guerin


Archive | 2016

METHOD FOR TRANSFERRING A LAYER FROM A SINGLE-CRYSTAL SUBSTRATE

Ludovic Ecarnot; Nicolas Daval; Nadia Ben Mohamed; François Boedt; Carole David; Isabelle Guerin


Archive | 2013

METHOD FOR MANUFACTURING SILICON-ON-INSULATOR STRUCTURE

Carole David; Sébastien Kerdiles


Archive | 2013

Method of implantation for fragilization of substrates

Nadia Ben Mohamed; Carole David; Camille Rigal


Archive | 2013

PROCESS FOR FABRICATING A SILICON-ON-INSULATOR STRUCTURE EMPLOYING TWO RAPID THERMAL ANNEALING PROCESSES, AND RELATED STRUCTURES

Carole David; Sébastien Kerdiles


Archive | 2013

Improved method of implantation for fragilization of substrates

Mohamed Nadia Ben; Carole David; Camille Rigal


Archive | 2013

Method of manufacturing a plurality of structures

Didier Landru; Oleg Kononchuk; Christophe Gourdel; Carole David; Sebastien Mougel; Xavier Schneider

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