Sébastien Kerdiles
Soitec
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Publication
Featured researches published by Sébastien Kerdiles.
international conference on ic design and technology | 2012
Walter Schwarzenbach; Nicolas Daval; Sébastien Kerdiles; G. Chabanne; C. Figuet; S. Guerroudj; Olivier Bonnin; X. Cauchy; Bich-Yen Nguyen; Christophe Maleville
Smart Cut™ technology is used to manufacture Strained-SOI (sSOI) substrates. These substrates are proposed to boost performance for both planar and FinFET Fully Depleted SOI devices. To comply with tight transistor variability requirements, strong emphasis has been put on layer thickness control and low stress variation. A 1.2 Å RMS roughness and less than 10% stress fluctuation are already demonstrated for sSOI wafers.
Archive | 2006
Nicolas Daval; Sébastien Kerdiles; Cecile Aulnette
Archive | 2004
Christophe Maleville; Corinne Maunand Tussot; Olivier Rayssac; Sébastien Kerdiles; Benjamin Scarfogliere; Hubert Moriceau; Christophe Morales
Archive | 2009
Sébastien Kerdiles; Christophe Maleville; Fabrice Letertre; Olivier Rayssac
Archive | 2010
Walter Schwarzenbach; Sébastien Kerdiles; Aziz Alami-Idrissi
Archive | 2003
Sébastien Kerdiles; Severine Bressot; Fabrice Letertre
Archive | 2012
Patrick Reynaud; Sébastien Kerdiles; Daniel Delprat
Archive | 2007
Eric Neyret; Sébastien Kerdiles
Archive | 2012
Carole David; Sébastien Kerdiles
Archive | 2007
Sébastien Kerdiles; Willy Michel; Walter Schwarzenbach; Daniel Delprat; Nadia Ben Mohamed
