Chiaki Hatsuta
Dai Nippon Printing
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Publication
Featured researches published by Chiaki Hatsuta.
Photomask and next-generation lithography mask technology. Conference | 2000
Keisuke Nakazawa; Takahiro Matsuo; Toshio Onodera; Hiroaki Morimoto; Hiroshi Mohri; Chiaki Hatsuta; Naoya Hayashi
We investigated the durability of CrOxFy film, which is used as a shifter for attenuated phase-shift masks (Att- PSMs), under ArF excimer laser irradiation. The phase shift of an as-deposited film decreased and the transmittance increased due to the disappearance of interfaces, which was caused by the migration of atoms. To improve durability, the sample was annealed at 300 degrees C to remove the interfaces, and the surface was etched to recover the decreased transmittance caused by the annealing. As a result, the lifetime became 1.5 years, which is sufficient for practical devices. The depth-of-focus of an ArF photoresist was 1.2 micrometers for a 0.13 micrometers line-and-space pattern and 0.5 micrometers for an 0.13 micrometers isolated contact- hole pattern when Att-PSMs made from CrOxFy film were used.
Archive | 2001
Satoshi Yusa; Toshifumi Yokoyama; Shigeki Sumida; Toshiaki Motonaga; Yoshinori Kinase; Hiro-o Nakagawa; Chiaki Hatsuta; Junji Fujikawa; Masashi Ohtsuki
Archive | 1996
Hideo Horita; Chiaki Hatsuta
Archive | 2000
Hiroshi Mohri; Toshiaki Motonaga; Chiaki Hatsuta; Norihito Ito; Naoya Hayashi; Toshio Fujisawa-shi Onodera; Takahiro Fujisawa-shi Matsuo; Toru Ogawa; Keisuke Nakazawa
Archive | 2001
Toshiaki Motonaga; Norihito Ito; Chiaki Hatsuta; Junji Fujikawa; Naoya Hayashi; Toshio Onodera; Takahiro Matsuo; Toru Ogawa; Keisuke Nakazawa
Archive | 1996
Hideo Horita; Chiaki Hatsuta
Archive | 2001
Hiro-o Nakagawa; Toshiaki Motonaga; Yoshinori Kinase; Satoshi Yusa; Shigeki Sumida; Toshifumi Yokoyama; Chiaki Hatsuta; Junji Fujikawa; Masashi Ohtsuki
Archive | 2001
Junji Fujikawa; Chiaki Hatsuta; Naoya Hayashi; Norihito Ito; Takahiro Fujisawa-shi Matsuo; Toshiaki Motonaga; Keisuke Nakazawa; Toru Kawasaki-shi Ogawa; Toshio Fujisawa-shi Onodera
Archive | 2001
Satoshi Yusa; Toshifumi Yokoyama; Shigeki Sumida; Toshiaki Motonaga; Yoshinori Kinase; Hiro-o Nakagawa; Chiaki Hatsuta; Junji Fujikawa; Masashi Ohtsuki
Archive | 2001
Hiro-o Nakagawa; Toshiaki Motonaga; Yoshinori Kinase; Satoshi Yusa; Shigeki Sumida; Toshifumi Yokoyama; Chiaki Hatsuta; Junji Fujikawa; Masashi Ohtsuki