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Chiung-Han Yeh

TSMC

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Publication

Featured researches published by Chiung-Han Yeh.

Archive | 2010

Method for tuning a work function of high-k metal gate devices

Chiung-Han Yeh; Sheng-Chen Chung; Kong-Beng Thei; Harry Chuang

Archive | 2008

INTEGRATED CIRCUIT METAL GATE STRUCTURE AND METHOD OF FABRICATION

Harry Chuang; Kong-Beng Thei; Chiung-Han Yeh; Ming-Yuan Wu; Mong-Song Liang

Archive | 2009

PHOTORESIST ETCH BACK METHOD FOR GATE LAST PROCESS

Chiung-Han Yeh; Chen-Pin Hsu; Ming-Yuan Wu; Kong-Beng Thei; Harry Chuang

Archive | 2009

Polysilicon design for replacement gate technology

Harry Hak-Lay Chuang; Kong-Beng Thei; Sheng-Chen Chung; Chiung-Han Yeh; Lee-Wee Teo; Yu-Ying Hsu; Bao-Ru Young

Archive | 2010

Integrating a first contact structure in a gate last process

Chiung-Han Yeh; Ming-Yuan Wu; Kong-Beng Thei; Harry Chuang; Mong-Song Liang

Archive | 2008

Spacer shape engineering for void-free gap-filling process

Ming-Yuan Wu; Yi-Shien Mor; Chih-tang Peng; Chiung-Han Yeh; Kong-Beng Thei; Harry Chuang; Mong-Song Liang

Archive | 2011

Dishing-free gap-filling with multiple CMPs

Ming-Yuan Wu; Kong-Beng Thei; Chiung-Han Yeh; Harry-Hak-Lay Chuang; Mong-Song Liang

Archive | 2009

DEVICE LAYOUT FOR GATE LAST PROCESS

Harry Chuang; Kong-Beng Thei; Chiung-Han Yeh; Mong-Song Liang; Hou-Ju Li; Ming-Yuan Wu; Tzung-Chi Lee

Archive | 2009

Dummy gate structure for gate last process

Su-Chen Lai; Ming-Yuan Wu; Kong-Beng Thei; Harry Hak-Lay Chuang; Chiung-Han Yeh; Hong-Dyi Chang; Kuo Cheng Cheng; Chien-Hung Wu; Tzung-Chi Lee

Archive | 2010

GATE STACK FOR HIGH-K/METAL GATE LAST PROCESS

Harry Hak-Lay Chuang; Kong-Beng Thei; Chiung-Han Yeh

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Collaboration

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Kong-Beng Thei

TSMC

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Ming-Yuan Wu

TSMC

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Harry Chuang

TSMC

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Mong-Song Liang

TSMC

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Tzung-Chi Lee

TSMC

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Chien-Hung Wu

TSMC

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Harry Hak-Lay Chuang

TSMC

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Hong-Dyi Chang

TSMC

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Su-Chen Lai

TSMC

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Harry-Hak-Lay Chuang

TSMC

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