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Ming-Yuan Wu

TSMC

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Publication

Featured researches published by Ming-Yuan Wu.

Archive | 2008

INTEGRATED CIRCUIT METAL GATE STRUCTURE AND METHOD OF FABRICATION

Harry Chuang; Kong-Beng Thei; Chiung-Han Yeh; Ming-Yuan Wu; Mong-Song Liang

Archive | 2009

PHOTORESIST ETCH BACK METHOD FOR GATE LAST PROCESS

Chiung-Han Yeh; Chen-Pin Hsu; Ming-Yuan Wu; Kong-Beng Thei; Harry Chuang

Archive | 2010

Integrating a first contact structure in a gate last process

Chiung-Han Yeh; Ming-Yuan Wu; Kong-Beng Thei; Harry Chuang; Mong-Song Liang

Archive | 2008

Spacer shape engineering for void-free gap-filling process

Ming-Yuan Wu; Yi-Shien Mor; Chih-tang Peng; Chiung-Han Yeh; Kong-Beng Thei; Harry Chuang; Mong-Song Liang

Archive | 2011

Dishing-free gap-filling with multiple CMPs

Ming-Yuan Wu; Kong-Beng Thei; Chiung-Han Yeh; Harry-Hak-Lay Chuang; Mong-Song Liang

Archive | 2009

DEVICE LAYOUT FOR GATE LAST PROCESS

Harry Chuang; Kong-Beng Thei; Chiung-Han Yeh; Mong-Song Liang; Hou-Ju Li; Ming-Yuan Wu; Tzung-Chi Lee

Archive | 2009

Dummy gate structure for gate last process

Su-Chen Lai; Ming-Yuan Wu; Kong-Beng Thei; Harry Hak-Lay Chuang; Chiung-Han Yeh; Hong-Dyi Chang; Kuo Cheng Cheng; Chien-Hung Wu; Tzung-Chi Lee

Archive | 2009

Photo alignment mark for a gate last process

Gary Shen; Ming-Yuan Wu; Chiung-Han Yeh; Kong-Beng Thei; Harry Chuang

Archive | 2012

METHOD OF FABRICATING A DUMMY GATE STRUCTURE IN A GATE LAST PROCESS

Su-Chen Lai; Ming-Yuan Wu; Kong-Beng Thei; Hak-Lay Chuang; Chiung-Han Yeh; Hong-Dyi Chang; Kuo Cheng-Cheng; Chien-Hung Wu; Tzung-Chi Lee

Archive | 2009

Semiconductor device and fabricating method for same

Su-Chen Lai; Ming-Yuan Wu; Kong-Beng Thei; Hak-Lay Chuang Harry; Chiung-Han Yeh; Hong-Dyi Chang; Cheng Cheng Kuo; Chien-Hung Wu; Tzung-Chi Lee

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Collaboration

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Kong-Beng Thei

TSMC

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Chiung-Han Yeh

TSMC

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Harry Chuang

TSMC

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Mong-Song Liang

TSMC

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Tzung-Chi Lee

TSMC

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Chien-Hung Wu

TSMC

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Hong-Dyi Chang

TSMC

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Su-Chen Lai

TSMC

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Harry-Hak-Lay Chuang

TSMC

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Chen-Pin Hsu

TSMC

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