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Frank Y. Lin

Lam Research

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Publication

Featured researches published by Frank Y. Lin.

Archive | 2002

Plasma excitation coil

Arthur M. Howald; Brian Mcmillin; Frank Y. Lin

Archive | 2002

Method of plasma etching organic antireflective coating

Tuqiang Ni; Weinan Jiang; Conan Chiang; Frank Y. Lin; Chris Lee; Dai N. Lee

Archive | 2004

Method to improve profile control and N/P loading in dual doped gate applications

Helene Del Puppo; Frank Y. Lin; Chris Lee; Vahid Vahedi; Thomas A. Kamp; Alan J. Miller; Saurabh Ullal; Harmeet Singh

Archive | 2002

Plasma processing method and apparatus with control of plasma excitation power

Tuqiang Ni; Frank Y. Lin; Chung-Ho Huang; Weinan Jiang

Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu

Archive | 2001

Method for improving uniformity and reducing etch rate variation of etching polysilicon

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin; Wenli Collison

Archive | 2001

Vacuum plasma processor apparatus and method

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin

Archive | 2012

Method for achieving smooth side walls after bosch etch process

Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller; Qing Xu; Seongjun Heo; Jin Hwan Ham; Sang Joon Yoon; Camelia Rusu

Archive | 2008

Line end shortening reduction during etch

Yoko Yamaguchi Adams; Gowri P. Kota; Frank Y. Lin; Qinghua Zhong

Archive | 2011

Method for providing high etch rate

Qing Xu; Camelia Rusu; Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller

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Tuqiang Ni

Lam Research

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Kenji Takeshita

Lam Research

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Tom Choi

Lam Research

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Camelia Rusu

Lam Research

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Chris Lee

Lam Research

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Jaroslaw W. Winniczek

Lam Research

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Weinan Jiang

Lam Research

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Wenli Collison

Lam Research

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Alan J. Miller

Lam Research

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Qing Xu

Lam Research

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