Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Frank Y. Lin is active.

Publication


Featured researches published by Frank Y. Lin.


Archive | 2002

Plasma excitation coil

Arthur M. Howald; Brian Mcmillin; Frank Y. Lin


Archive | 2002

Method of plasma etching organic antireflective coating

Tuqiang Ni; Weinan Jiang; Conan Chiang; Frank Y. Lin; Chris Lee; Dai N. Lee


Archive | 2004

Method to improve profile control and N/P loading in dual doped gate applications

Helene Del Puppo; Frank Y. Lin; Chris Lee; Vahid Vahedi; Thomas A. Kamp; Alan J. Miller; Saurabh Ullal; Harmeet Singh


Archive | 2002

Plasma processing method and apparatus with control of plasma excitation power

Tuqiang Ni; Frank Y. Lin; Chung-Ho Huang; Weinan Jiang


Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu


Archive | 2001

Method for improving uniformity and reducing etch rate variation of etching polysilicon

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin; Wenli Collison


Archive | 2001

Vacuum plasma processor apparatus and method

Tuqiang Ni; Kenji Takeshita; Tom Choi; Frank Y. Lin


Archive | 2012

Method for achieving smooth side walls after bosch etch process

Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller; Qing Xu; Seongjun Heo; Jin Hwan Ham; Sang Joon Yoon; Camelia Rusu


Archive | 2008

Line end shortening reduction during etch

Yoko Yamaguchi Adams; Gowri P. Kota; Frank Y. Lin; Qinghua Zhong


Archive | 2011

Method for providing high etch rate

Qing Xu; Camelia Rusu; Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller

Collaboration


Dive into the Frank Y. Lin's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge