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Dale Keith Stone

Eaton Corporation

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Publication

Featured researches published by Dale Keith Stone.

Archive | 1994

Wafer sensing and clamping monitor

Julian G. Blake; Weilin Tu; Dale Keith Stone; Scott Carleton Holden

Archive | 1995

Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter

Julian G. Blake; Robert Becker; David Chipman; Mary Jones; Lyudmila Menn; Frank Sinclair; Dale Keith Stone

Archive | 2010

COATED GRAPHITE LINERS

Julian G. Blake; Dale Keith Stone; Lyudmila Stone

Archive | 2016

Apparatus for improving temperature uniformity of a workpiece

Dawei Sun; D. Jeffrey Lischer; Steven M. Anella; Dale Keith Stone; Lyudmila Stone

Archive | 2011

Mandrin électrostatique à résistivité de grande surface

Richard A. Cooke; Dale Keith Stone; Lyudmila Stone; Julian G. Blake; David E. Suuronen

Archive | 2011

Mandrin électrostatique à conductivité élevée

David E. Suuronen; Lyudmila Stone; Julian G. Blake; Dale Keith Stone; Richard A. Cooke; Steven Donnell; Chandra Venkatraman

Archive | 1996

Verfahren und Gerät zum Einfangen und Entfernen von kontaminierenden Teilchen aus einem inneren Bereich eines Ionen-implantierungsgerätes Method and apparatus for capturing and removing contaminant particles from an interior region of an ion-implantierungsgerätes

Julian G. Blake; Robert Becker; David Chipman; Mary Jones; Lyudmila Menn; Frank Sinclair; Dale Keith Stone

Archive | 1994

Halbleiterplatte-Detektierung mit Festklemmen-Überwachung

Julian G. Blake; Weilin Tu; Dale Keith Stone; Scott Carleton Holden

Archive | 1994

Halbleiterplatte-Detektierung mit Festklemmen-Überwachung Semiconductor plate detection with clamping monitoring

Julian G. Blake; Weilin Tu; Dale Keith Stone; Scott Carleton Holden

Archive | 1994

Halbleiterplatte-Detektierung mit Festklemmen-Überwachung RAM disk-detect with clamping monitoring

Julian G. Blake; Weilin Tu; Dale Keith Stone; Scott Carleton Holden

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Collaboration

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Julian G. Blake

Eaton Corporation

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Scott Carleton Holden

Eaton Corporation

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Weilin Tu

Axcelis Technologies

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Lyudmila Stone

Axcelis Technologies

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David Chipman

Eaton Corporation

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David E. Suuronen

Varian Semiconductor

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Frank Sinclair

Eaton Corporation

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Lyudmila Menn

Eaton Corporation

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Mary Jones

Eaton Corporation

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Richard A. Cooke

Entegris

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