Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where David E. Suuronen is active.

Publication


Featured researches published by David E. Suuronen.


Archive | 2005

Clamp for use in processing semiconductor workpieces

Richard S. Muka; Paul J. Murphy; David E. Suuronen


Archive | 2005

Technique for reducing backside particles

David E. Suuronen; Arthur P. Riaf; Paul Stephen Buccos; Kevin Michael Daniels; Paul J. Murphy; Lawrence Ficarra; Kenneth L. Starks


Archive | 2011

High Conductivity Electrostatic Chuck

David E. Suuronen; Lyudmila Stone; Julian G. Blake; Dale K. Stone; Richard A. Cooke; Steven Donnell; Chandra Venkatraman


Archive | 2010

Removal of charge between a substrate and an electrostatic clamp

Dale K. Stone; Lyudmila Stone; David E. Suuronen; Klaus Petry; Julian G. Blake


Archive | 2007

Electrostatic chuck with separated electrodes

Julian G. Blake; Dale K. Stone; Lyudmila Stone; David E. Suuronen


Archive | 2011

PLATEN TO CONTROL CHARGE ACCUMULATION

Dale K. Stone; Lyudmila Stone; Julian G. Blake; Frederick B. Ammon; David E. Suuronen


Archive | 2008

EMBOSSED ELECTROSTATIC CHUCK

D. Jeffrey Lischer; Dale K. Stone; Lyudmila Stone; David E. Suuronen; Julian G. Blake


Archive | 2011

Triboelectric charge controlled electrostatic clamp

Julian G. Blake; Dale K. Stone; Lyudmila Stone; David E. Suuronen; Shigeo Oshiro


Archive | 2011

High Surface Resistivity Electrostatic Chuck

Richard A. Cooke; Dale K. Stone; Lyudmila Stone; Julian G. Blake; David E. Suuronen


Archive | 2013

PLATEN CLAMPING SURFACE MONITORING

David E. Suuronen; Julian G. Blake; Kurt Decker-Lucke; James Carroll; Klaus Petry

Collaboration


Dive into the David E. Suuronen's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge