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Dale R. Du Bois

Applied Materials

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Publication

Featured researches published by Dale R. Du Bois.

Archive | 2005

Mixing energized and non-energized gases for silicon nitride deposition

Kee Bum Jung; Dale R. Du Bois; Lun Tsuei; Lihua Li Huang; Martin Jay Seamons; Soovo Sen; Reza Arghavani; Michael Chiu Kwan

Archive | 1993

Clamping ring and susceptor therefor

Semyon Sherstinsky; Charles C. Harris; Mei Chang; Dale R. Du Bois; James F. Roberts; Susan Telford; Ronald L. Rose; Meng C. Tseng; Karl A. Littau

Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho

Archive | 2007

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho

Archive | 2002

Method and a system for sealing an epitaxial silicon layer on a substrate

David K. Carlson; Dale R. Du Bois

Archive | 2010

Multifunctional heater/chiller pedestal for wide range wafer temperature control

Lipyeow Yap; Tuan Anh Nguyen; Dale R. Du Bois; Sanjeev Baluja; Thomas Nowak; Juan Carlos Rocha-Alvarez; Jianhua Zhou

Archive | 2010

Shadow ring for modifying wafer edge and bevel deposition

Dale R. Du Bois; Mohamad A. Ayoub; Robert Kim; Amit Kumar Bansal; Mark Fodor; Binh Nguyen; Siu F. Cheng; Hang Yu; Chiu Chan; Ganesh Balasubramanian; Deenesh Padhi; Juan Carlos Rocha

Archive | 2009

Method and System for Supplying a Cleaning Gas Into a Process Chamber

Ramprakash Sankarakrishnan; Dale R. Du Bois; Ganesh Balasubramanian; Karthik Janakiraman; Juan Carlos Rocha-Alvarez; Thomas Nowak; Visweswaren Sivaramakrishnan; Hichem M'Saad

Archive | 2008

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Karthik Janakiraman; Thomas Nowak; Juan Carlos Rocha-Alvarez; Mark Fodor; Dale R. Du Bois; Amit Kumar Bansal; Mohamad A. Ayoub; Eller Y. Juco; Visweswaren Sivaramakrishnan; Hichem M'Saad

Archive | 2006

Nitrogen enriched cooling air module for uv curing system

Dustin W. Ho; Juan Carlos Rocha-Alvarez; Dale R. Du Bois; Scott A. Hendrickson; Sanjeev Baluja; Ndanka O. Mukuti

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Juan Carlos Rocha-Alvarez

Applied Materials

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Ganesh Balasubramanian

Applied Materials

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Thomas Nowak

Applied Materials

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Jianhua Zhou

Applied Materials

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Mark Fodor

Applied Materials

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Sanjeev Baluja

Applied Materials

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Karthik Janakiraman

Applied Materials

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Mohamad A. Ayoub

Applied Materials

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Amit Kumar Bansal

Applied Materials

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Dustin W. Ho

Applied Materials

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