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Karthik Janakiraman

Applied Materials

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Publication

Featured researches published by Karthik Janakiraman.

Archive | 2000

Integration of remote plasma generator with semiconductor processing chamber

Karthik Janakiraman; Kelly Fong; Chen-An Chen; Paul Le; Rong Pan; Shankar Venkataraman

Archive | 2003

Blocker plate by-pass for remote plasma clean

Karthik Janakiraman; Edwin C. Suarez

Archive | 2003

Backflush chamber clean

Keith R. Harvey; Karthik Janakiraman; Kirby H. Floyd

Archive | 2002

Gas distribution showerhead

Karthik Janakiraman; Nitin K. Ingle; Zheng Yuan; Steven Gianoulakis

Archive | 2006

Enhancement of remote plasma source clean for dielectric films

Thomas Nowak; Kang Sub Yim; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Vu Ngoc Tran Nguyen; Dennis Singleton; Martin Jay Seamons; Karthik Janakiraman; Ganesh Balasubramanian; Mohamed Ayoub; Wendy H. Yeh; Alexandros T. Demos; Hichem M'Saad

Archive | 2007

Method for depositing an amorphous carbon film with improved density and step coverage

Deenesh Padhi; Hyoung-Chan Ha; Sudha Rathi; Derek R. Wtty; Chiu Chan; Sohyun Park; Ganesh Balasubramanian; Karthik Janakiraman; Martin Jay Seamons; Visweswaren Sivaramakrishnan; Bok Hoen Kim; Hichem M'Saad

Archive | 2004

Reduction of reactive gas attack on substrate heater

David P. Sun; Keith R. Harvey; Nitin K. Ingle; Karthik Janakiraman

Archive | 2006

Gas distribution showerhead featuring exhaust apertures

Steven Gianoulakis; Karthik Janakiraman

Archive | 2008

Systems for plasma enhanced chemical vapor deposition and bevel edge etching

Ashish Shah; Dale R. DuBois; Ganesh Balasubramanian; Mark Fodor; Eui Kyoon Kim; Chiu Chan; Karthik Janakiraman; Thomas Nowak; Joseph C. Werner; Visweswaren Sivaramakrishnan; Mohamad A. Ayoub; Amir Al-Bayati; Jianhua Zhou

Archive | 2002

Gas flow control in a wafer processing system having multiple chambers for performing same process

Karthik Janakiraman; Victor Wang; Vikash Banthia; Teresa Winson; Nitin K. Ingle

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Ganesh Balasubramanian

Applied Materials

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Hichem M'Saad

Applied Materials

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Visweswaren Sivaramakrishnan

Applied Materials

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Chiu Chan

Applied Materials

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Martin Jay Seamons

Applied Materials

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Deenesh Padhi

Applied Materials

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Juan Carlos Rocha-Alvarez

Applied Materials

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Thomas Nowak

Applied Materials

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Jianhua Zhou

Applied Materials

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Mohamad A. Ayoub

Applied Materials

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