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Dive into the research topics where Juan Carlos Rocha-Alvarez is active.

Publication


Featured researches published by Juan Carlos Rocha-Alvarez.


Archive | 2003

Method and apparatus for cleaning a CVD chamber

Maosheng Zhao; Juan Carlos Rocha-Alvarez; Inna Shmurun; Soova Sen; Mao D. Lim; Shankar Venkataraman; Ju-hyung Lee


Archive | 2002

Heated gas distribution plate for a processing chamber

Lun Tsuei; Soovo Sen; Ju-hyung Lee; Juan Carlos Rocha-Alvarez; Inna Shmurun; Maosheng Zhao; Troy Kim; Shankar Venkataraman


Archive | 2005

Tandem uv chamber for curing dielectric materials

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 2014

YTTRIA-BASED MATERIAL COATED CHEMICAL VAPOR DEPOSITION CHAMBER HEATER

Ren-Guan Duan; Juan Carlos Rocha-Alvarez; Jianhua Zhou


Archive | 2006

High efficiency UV curing system

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2001

Method and apparatus for fluid flow control

Juan Carlos Rocha-Alvarez; Chen-An Chen; Shankar Venkataraman


Archive | 2002

PLASMA ENHANCED CVD LOW K CARBON-DOPED SILICON OXIDE FILM DEPOSITION USING VHF-RF POWER

Juan Carlos Rocha-Alvarez; Maosheng Zhao; Ying Yu; Shankar Venkataraman; Srinivas D. Nemani; Li-Qun Xia


Archive | 2007

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 2006

Increased tool utilization/reduction in MWBC for UV curing chamber

Juan Carlos Rocha-Alvarez; Thomas Nowak; Sanjeev Baluja; Andrzej Kaszuba; Ndanka O. Mukuti

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