Juan Carlos Rocha-Alvarez

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Juan Carlos Rocha-Alvarez is active.

Explore More

Publication

Featured researches published by Juan Carlos Rocha-Alvarez.

Archive | 2003

Method and apparatus for cleaning a CVD chamber

Maosheng Zhao; Juan Carlos Rocha-Alvarez; Inna Shmurun; Soova Sen; Mao D. Lim; Shankar Venkataraman; Ju-hyung Lee

Archive | 2002

Heated gas distribution plate for a processing chamber

Lun Tsuei; Soovo Sen; Ju-hyung Lee; Juan Carlos Rocha-Alvarez; Inna Shmurun; Maosheng Zhao; Troy Kim; Shankar Venkataraman

Archive | 2005

Tandem uv chamber for curing dielectric materials

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad

Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho

Archive | 2014

YTTRIA-BASED MATERIAL COATED CHEMICAL VAPOR DEPOSITION CHAMBER HEATER

Ren-Guan Duan; Juan Carlos Rocha-Alvarez; Jianhua Zhou

Archive | 2006

High efficiency UV curing system

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad

Archive | 2001