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Dive into the research topics where Amit Kumar Bansal is active.

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Featured researches published by Amit Kumar Bansal.


Archive | 2010

Shadow ring for modifying wafer edge and bevel deposition

Dale R. Du Bois; Mohamad A. Ayoub; Robert Kim; Amit Kumar Bansal; Mark Fodor; Binh Nguyen; Siu F. Cheng; Hang Yu; Chiu Chan; Ganesh Balasubramanian; Deenesh Padhi; Juan Carlos Rocha


Archive | 2008

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Karthik Janakiraman; Thomas Nowak; Juan Carlos Rocha-Alvarez; Mark Fodor; Dale R. Du Bois; Amit Kumar Bansal; Mohamad A. Ayoub; Eller Y. Juco; Visweswaren Sivaramakrishnan; Hichem M'Saad


Archive | 2011

Confined process volume pecvd chamber

Ramprakash Sankarakrishnan; Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Dale R. Du Bois; Mark Fodor; Jianhua Zhou; Amit Kumar Bansal; Mohamad A. Ayoub; Shahid Shaikh; Patrick Reilly; Deenesh Padhi; Thomas Nowak


Archive | 2015

WAFER ROTATION IN A SEMICONDUCTOR CHAMBER

Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Ramprakash Sankarakrishnan; Robert Kim; Dale R. Du Bois; Kirby H. Floyd; Amit Kumar Bansal; Tuan Anh Nguyen


Archive | 2007

Apparatus and method for substrate clamping in a plasma chamber

Ganesh Balasubramanian; Amit Kumar Bansal; Eller Y. Juco; Mohamad A. Ayoub; Hyung-Joon Kim; Karthik Janakiraman; Sudha Rathi; Deenesh Padhi; Martin Jay Seamons; Visweswaren Sivaramakrishnan; Bok Hoen Kim; Amir Al-Bayati; Hichem M'Saad; Anton Baryshnikov; Chiu Chan; Shuang Liu


Archive | 2014

TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER

Bois Dale R. Du; Bozhi Yang; Jianhua Zhou; Sanjeev Baluja; Amit Kumar Bansal; Juan Carlos Rocha-Alvarez


Archive | 2014

Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber

Mohamad A. Ayoub; Jian J. Chen; Amit Kumar Bansal


Archive | 2014

CONTROLLING TEMPERATURE IN SUBSTRATE PROCESSING SYSTEMS

Juan Carlos Rocha-Alvarez; Amit Kumar Bansal; Ganesh Balasubramanian; Jianhua Zhou; Ramprakash Sankarakrishnan


Archive | 2014

ROTATION ENABLED MULTIFUNCTIONAL HEATER-CHILLER PEDESTAL

Tuan Anh Nguyen; Sanjeev Baluja; Amit Kumar Bansal; Juan Carlos Rocha-Alvarez


Archive | 2013

BOTTOM AND SIDE PLASMA TUNING HAVING CLOSED LOOP CONTROL

Juan Carlos Rocha-Alvarez; Amit Kumar Bansal; Ganesh Balasubramanian; Jianhua Zhou; Ramprakash Sankarakrishnan; Mohamad A. Ayoub; Jian J. Chen

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