Daniel Krähmer
Carl Zeiss AG
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Daniel Krähmer.
Optical Microlithography XVIII | 2005
Michael Totzeck; Paul Gräupner; Tilmann Heil; Aksel Göhnermeier; Olaf Dittmann; Daniel Krähmer; Vladimir Kamenov; Johannes Ruoff; Donis G. Flagello
We give a general introduction into polarized imaging and report on a Jones-pupil approach for a complete evaluation of the resulting optical performance. The Jones pupil assigns a Jones matrix to each point of the exit pupil describing the impact of both the global phase and the polarization on imaging. While we can learn already a lot about the optical system by taking a close look at the Jones pupil - and starting imaging simulations from it - a quantitative assessment is necessary for a complete evaluation of imaging. To do this, we generalize the concept of scalar Zernike aberrations to Jones-Zernike aberrations by expansion of the Jones pupil into vector polynomials. The resulting method is non-paraxial, i.e. the effect of the polarization dependent contrast loss for high numerical apertures is included. The aberrations of the Jones-matrix pupil are a suitable tool to identify the main drivers determining the polarization performance. Furthermore, they enable us to compare the polarized and the unpolarized performance of the such characterized lithographic system.
Archive | 2002
Daniel Krähmer; Toralf Gruner; Wilhelm Ulrich; Birgit Enkisch; Michael Gerhard; Martin Brunotte; Christian Wagner; Winfried Kaiser; Manfred Maul; Christoph Zaczek
Archive | 2003
Daniel Krähmer; Toralf Gruner; Wilhelm Ulrich; Birgit Enkisch; Michael Gerhard; Martin Brunotte; Christian Wagner; Winfried Kaiser; Manfred Maul; Christoph Zaczek
Archive | 2002
Michael Gerhard; Daniel Krähmer
Archive | 2002
Michael Gerhard; Daniel Krähmer
Archive | 2006
Michael Totzeck; Susanne Beder; Wilfried Clauss; Heiko Feldmann; Daniel Krähmer; Aurelian Dodoc
Archive | 2007
Gerhard Fürter; Ulrich Löring; Daniel Krähmer; Aurelian Dodoc; Heiko Feldmann; David Shafer; Wilhelm Ulrich; Holger Walter; Johannes Zellner
Archive | 2004
Daniel Krähmer; Wilhelm Ulrich
Proceedings of SPIE, the International Society for Optical Engineering | 2008
Tilmann Heil; Johannes Ruoff; Jens Timo Neumann; Michael Totzeck; Daniel Krähmer; Bernd Geh; Paul Gräupner
Archive | 2005
Daniel Krähmer