Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Ingo Sänger is active.

Publication


Featured researches published by Ingo Sänger.


Archive | 2012

Optisches System für eine mikrolithographische Projektionsbelichtungsanlage sowie mikrolithographisches Belichtungsverfahren

Ingo Sänger; Frank Schlesener


Archive | 2013

Optisches System, insbesondere einer mikrolithographischen Projektionsbelichtungsanlage

Ingo Sänger


Archive | 2013

Optical system for microlithographic projection exposure system for manufacturing e.g. LCDs, has beam-splitting optic element arranged such that degree of polarization of incident light beam is lesser than specified value

Ingo Sänger; Jörg Zimmermann; Johannes Ruoff; Martin Meier; Frank Schlesener; Christoph Hennerkes


Archive | 2013

Optisches System einer mikrolithographischen Projektionsbelichtungsanlage

Olaf Dittmann; Ingo Sänger; Jörg Zimmermann


Archive | 2011

Optical system for a microlithographic projection apparatus

Ingo Sänger; Ralf Scharnweber; Olaf Dittmann; Toralf Gruner; Gundula Weiss; András G. Major; Martin Vogt; Markus Degünther; Johannes Wangler; Thomas Korb; Severin Waldis


Archive | 2013

Optical system for wafer inspection system for detecting wafer defects or impurities, comprises polarization beam splitter, and transmissive optical element that causes rotation of polarization device by linear polarized light

Ingo Sänger; Michael Totzeck; Frank Schlesener; Daniel Krähmer; Reiner Garreis; Bernd Reimann


Archive | 2013

Beleuchtungsoptik für eine Projektionsbelichtungsanlage

Ingo Sänger


Archive | 2013

Facet mirror for e.g. extreme UV (EUV) projection exposure system used in lighting system, has mirror facet unit that varies radius of curvature of mirror facet from specific radius of curvature to another radius of curvature

Ingo Sänger


Archive | 2012

Optical system for microlithographic projection exposure system utilized for manufacturing e.g. LCD, has mirror elements adjusted independent of each other, and retarding layer arranged on reflection surface of one of mirror elements

Ingo Sänger


Archive | 2011

Polarisationsbeeinflussende optische Anordnung, sowie optisches System einer mikrolithographischen Projektionsbelichtungsanlage

Ingo Sänger

Collaboration


Dive into the Ingo Sänger's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge