Olaf Dittmann
Carl Zeiss AG
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Olaf Dittmann.
Journal of Micro-nanolithography Mems and Moems | 2005
Michael Totzeck; Paul Gräupner; Tilmann Heil; Aksel Göhnermeier; Olaf Dittmann; Daniel Kraehmer; Vladimir Kamenov; Johannes Ruoff; Donis G. Flagello
We give a general introduction into polarized imaging and report on a Jones pupil approach for a complete evaluation of the resulting optical performance. The Jones pupil assigns a Jones matrix to each point of the exit pupil, describing the impact of both the global phase and the polarization on imaging. While we already can learn much about the optical system by taking a close look at the Jones pupil-and starting imaging simulations from it-a quantitative assessment is necessary for a complete evaluation of imaging. To do this, we generalize the concept of scalar Zernike aberrations to Jones-Zernike aberrations by expansion of the Jones pupil into vector polynomials. The resulting method is nonparaxial, i.e., the effect of the polarization-dependent contrast loss for high numerical apertures is included. The aberrations of the Jones matrix pupil are a suitable tool to identify the main drivers determining polarization performance. Furthermore, they enable us to compare the polarized and unpolarized performance of such a characterized lithographic system.
Optical Microlithography XVIII | 2005
Michael Totzeck; Paul Gräupner; Tilmann Heil; Aksel Göhnermeier; Olaf Dittmann; Daniel Krähmer; Vladimir Kamenov; Johannes Ruoff; Donis G. Flagello
We give a general introduction into polarized imaging and report on a Jones-pupil approach for a complete evaluation of the resulting optical performance. The Jones pupil assigns a Jones matrix to each point of the exit pupil describing the impact of both the global phase and the polarization on imaging. While we can learn already a lot about the optical system by taking a close look at the Jones pupil - and starting imaging simulations from it - a quantitative assessment is necessary for a complete evaluation of imaging. To do this, we generalize the concept of scalar Zernike aberrations to Jones-Zernike aberrations by expansion of the Jones pupil into vector polynomials. The resulting method is non-paraxial, i.e. the effect of the polarization dependent contrast loss for high numerical apertures is included. The aberrations of the Jones-matrix pupil are a suitable tool to identify the main drivers determining the polarization performance. Furthermore, they enable us to compare the polarized and the unpolarized performance of the such characterized lithographic system.
Archive | 2004
Damian Fiolka; Olaf Dittmann; Michael Totzeck; Nils Dieckmann; Jess Koehler; Toralf Gruner; Daniel Kraehmer
Archive | 2005
Michael Totzeck; Gerhart Fuerter; Olaf Dittmann; Karl-Heinz Schuster; David Shafer; Susanne Beder
Archive | 2006
Hans-Juergen Mann; Wolfgang Singer; Toralf Gruner; Olaf Dittmann; Michael Totzeck
Archive | 2002
Juergen Hartmaier; Damian Fiolka; Markus Zenzinger; Birgit Mecking; Olaf Dittmann; Toralf Gruner; Vladimir Kamenov; Martin Brunotte
Archive | 2006
Ralf Mueller; Olaf Dittmann; Michael Totzeck; Daniel Kraehmer; Christoph Zaczek; Karl-Heinz Schuster
Archive | 2004
Juergen Hartmaier; Damian Fiolka; Markus Zenzinger; Birgit Mecking; Olaf Dittmann; Toralf Gruner; Vladimir Kamenov; Martin Brunotte
Archive | 2006
Toralf Gruner; Olaf Conradi; Nils Dieckmann; Markus Schwab; Olaf Dittmann; Michael Totzeck; Daniel Kraehmer; Vladimir Kamenov
Archive | 2012
Damian Fiolka; Olaf Dittmann; Ralf Müller; Gundula Weiss; András G. Major; Martin Vogt; Jörg Zimmermann