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Dive into the research topics where David Datong Huo is active.

Publication


Featured researches published by David Datong Huo.


Archive | 1997

Magnetron with cooling system for process chamber of processing system

David T. Or; David Datong Huo; J. Darrel Stickler


Archive | 1997

Embossed semiconductor fabrication parts

Donald M. Mintz; Anantha K. Subramani; Lolita L. Sharp; David Datong Huo


Archive | 1999

Method and apparatus for baking out a gate valve in a semiconductor processing system

Timothy J. Franklin; David Datong Huo


Archive | 2007

Method of making and apparatus having polishing pad with window

Andreas Norbert Wiswesser; Ramiel Oshana; Kerry F. Hughes; Jay S. Rohde; David Datong Huo; Dominic J. Benvegnu


Archive | 2007

Composite retaining ring

Jeonghoon Oh; Hung Chih Chen; Thomas Brezoczky; Douglas R. Mcallister; David Datong Huo


Archive | 1997

Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal

David Datong Huo; Bret W. Adams; John Jarvis


Archive | 1999

Restrictor shield having a variable effective throughout area

David Datong Huo


Archive | 1997

Method and apparatus for removing contaminant particles from surfaces in semiconductor processing equipment

David Datong Huo


Archive | 2006

Ozonation for elimination of bacteria for wet processing systems

Bruce Willing; Daniel P. Forster; David Datong Huo; Robert D. Tolles; Christopher L. Haynes; Steven T. Mear; David Paul; William M. Evans


Archive | 2012

High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods

Hui Chen; Hung Chen; Jim K. Atkinson; David Datong Huo

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