Bret W. Adams | Researchain

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Featured researches published by Bret W. Adams.

Archive | 2000

Integrated electrodeposition and chemical mechanical polishing tool

Sasson Somekh; Debabrata Ghosh; Bret W. Adams

Archive | 1998

Integrated manufacturing tool comprising electroplating, chemical-mechanical polishing, clean and dry stations, and method therefor

Somekh Sasson; Debrabrata Ghosh; Bret W. Adams

Archive | 2006

Polishing system with in-line and in-situ metrology

Boguslaw A. Swedek; Bret W. Adams; Sanjay Rajaram; David A. Chan; Manoocher Birang

Archive | 2000

Determining when to replace a retaining ring used in substrate polishing operations

Hung Chih Chen; Steven M. Zuniga; Bret W. Adams; Manoocher Birang; Kean Chew

Archive | 1997

Particle trap in a magnetron sputtering chamber

Bret W. Adams; Ivo Raaijmakers

Archive | 1997

Back sputtering shield

Bret W. Adams; Gregory N. Hamilton

Archive | 1997

Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal

David Datong Huo; Bret W. Adams; John Jarvis

Archive | 2007

Computer-implemented method for process control in chemical mechanical polishing

Boguslaw A. Swedek; Bret W. Adams; Sanjay Rajaram; David A. Chan; Manoocher Birang

Archive | 2001

OPTICAL MONITOR METHOD IN TWO-STEP CHEMICAL MECHANICAL POLISHING PROCESS

Bret W. Adams; Rajeev Bajaj; Manoocher Birang; David A. Chan; Savitha Nanjangud; Fred C. Redeker; Boguslaw A. Swedek; Stan D. Tsai; Andreas Norbert Wiswesser; ノルベルトヴィスヴェッサーアンドレアス; ナンジャングドサヴィサ; ディ．ツァイスタン; エー．チャンデイヴィッド; シー．レデカーフレッド; ダブリューアダムズブレット; スウェデクボグスロー; ビラングマヌーチャ; バジャジュラジーヴ

Archive | 2011