David E. Jacob | Researchain

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Publication

Featured researches published by David E. Jacob.

Archive | 2009

Showerhead electrode assembly for plasma processing apparatuses

William S. Kennedy; David E. Jacob

Archive | 1999

Wafer atmospheric transport module having a controlled mini-environment

Farro F. Kaveh; David E. Jacob; Dean J. Larson; Martin Robert Maraschin

Archive | 2002

Rapid cycle chamber having a top vent with nitrogen purge

Harlan I. Halsey; David E. Jacob

Archive | 1998

Apparatus method for determining the presence or absence of a wafer on a wafer holder

David E. Jacob

Archive | 2002

Diffuser and rapid cycle chamber

Harlan I. Halsey; David E. Jacob

Archive | 2009

Electrode assembly for plasma processing apparatus

William S. Kennedy; David E. Jacob

Archive | 2001

Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation

Harlan I. Halsey; David E. Jacob

Archive | 2002

Methods to minimize moisture condensation over a substrate in a rapid cycle chamber

Harlan I. Halsey; David E. Jacob

Archive | 2009

Method of making an electrode assembly for plasma processing apparatus

William S. Kennedy; David E. Jacob

Archive | 2011

THERMAL CONTROL PLATE

William S. Kennedy; David E. Jacob

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Collaboration

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Harlan I. Halsey

Lam Research

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William S. Kennedy

Lam Research

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Dean J. Larson

Lam Research

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Farro F. Kaveh

Lam Research

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Martin Robert Maraschin

Lam Research

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