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Farro F. Kaveh

Lam Research

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Publication

Featured researches published by Farro F. Kaveh.

Archive | 1999

Method and apparatus for pressure control in vacuum processors

Brian Mcmillin; Farro F. Kaveh; Michael Barnes

Archive | 1999

Wafer atmospheric transport module having a controlled mini-environment

Farro F. Kaveh; David E. Jacob; Dean J. Larson; Martin Robert Maraschin

Archive | 2000

Integrated full wavelength spectrometer for wafer processing

Tuqiang Ni; Tuan Ngo; Chung-Ho Huang; Andrew Lui; Farro F. Kaveh

Archive | 2001

PLASMA PROCESSING DEVICE WITH INTEGRATED FULL WAVELENGTH SPECTROMETER FOR WAFER PROCESSING

Ni Tuqiang; Tuan Ngo; Chung-Ho Huang; Andrew Lui; Farro F. Kaveh

Archive | 1999

Verfahren und Vorrichtung zur Regelung des Druckes in Vakuumprozessoren

Michael Barnes; Farro F. Kaveh; Brian K. Mcmillan

Archive | 1999

Verfahren und vorrichtung zur Regelung des Druckes in Vakuumprozessoren Method and apparatus for controlling the pressure in vacuum processors

Brian K. Mcmillan; Michael Barnes; Farro F. Kaveh

Archive | 1999

Method and device for regulating the pressure in vacuum processors

Michael Barnes; Farro F. Kaveh; Brian K. Mcmillan

Archive | 1999

Verfahren und vorrichtung zur druckregelung in vakuumanlagen Method and device for pressure control in vacuum systems

K Mcmillin; Farro F. Kaveh; Michael Barnes

Archive | 1999

Verfahren und Vorrichtung zur Regelung des Druckes in Vakuumprozessoren Method and device for regulating the pressure in vacuum processors

Michael Barnes; Farro F. Kaveh; Brian K. Mcmillan

Archive | 1998

Techniques for reducing particulate contamination on a substrate during processing

Farro F. Kaveh; Brett C. Richardson

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Michael Barnes

Lam Research

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Andrew Lui

Lam Research

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Chung-Ho Huang

Lam Research

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Tuan Ngo

Lam Research

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Brett C. Richardson

Lam Research

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Brian Mcmillin

Lam Research

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David E. Jacob

Lam Research

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Dean J. Larson

Lam Research

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Martin Robert Maraschin

Lam Research

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Ni Tuqiang

Lam Research

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