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William S. Kennedy

Lam Research

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Publication

Featured researches published by William S. Kennedy.

Archive | 1999

Electrode for plasma processes and method for manufacture and use thereof

John Lilleland; Jerome S. Hubacek; William S. Kennedy

Archive | 2002

Low contamination high density plasma etch chambers and methods for making the same

Thomas E. Wicker; Robert A. Maraschin; William S. Kennedy

Archive | 2009

Showerhead electrode assembly for plasma processing apparatuses

William S. Kennedy; David E. Jacob

Archive | 1997

Temperature sensing system for use in a radio frequency environment

Jian Janson Chen; William S. Kennedy

Archive | 1996

Temperature controlling method and apparatus for a plasma processing chamber

Thomas E. Wicker; Joel M. Cook; Robert A. Maraschin; William S. Kennedy; Neil Benjamin

Archive | 2007

Bevel etcher with gap control

Andrew D. Bailey; Alan M. Schoepp; Gregory Sexton; Andras Kuthi; Yunsang Kim; William S. Kennedy

Archive | 2000

Semiconductor processing equipment having radiant heated ceramic liner

William S. Kennedy; Robert A. Maraschin; Thomas E. Wicker

Archive | 1999

Semiconductor processing equipment having tiled ceramic liner

William S. Kennedy; Robert A. Maraschin; Jerome S. Hubacek

Archive | 2001

Method of manufacturing assembly for plasma reaction chamber and use thereof

John Lilleland; Jerome S. Hubacek; William S. Kennedy

Archive | 2003

Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode

Andreas Fischer; William S. Kennedy; Peter Loewenhardt; David Trussell

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Robert A. Maraschin

Lam Research

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Thomas E. Wicker

Lam Research

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Jerome S. Hubacek

Lam Research

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John Lilleland

Lam Research

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Alan M. Schoepp

Lam Research

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Andrew D. Bailey

Lam Research

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David E. Jacob

Lam Research

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Gregory Sexton

Lam Research

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Albert J. Lamm

Lam Research

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Joel M. Cook

Lam Research

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