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Dean J. Larson

Lam Research

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Publication

Featured researches published by Dean J. Larson.

Archive | 2012

Gas switching section including valves having different flow coefficients for gas distribution system

Dean J. Larson

Archive | 2003

Uniform etch system

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 2013

Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber

Dean J. Larson; Robert C. Hefty; James V. Tietz; Williams S. Kennedy; Eric Lenz; William M. Denty; Enrico Magni

Archive | 2002

Gas distribution system with tuning gas

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 1999

Wafer atmospheric transport module having a controlled mini-environment

Farro F. Kaveh; David E. Jacob; Dean J. Larson; Martin Robert Maraschin

Archive | 2013

Composite showerhead electrode assembly for a plasma processing apparatus

Dean J. Larson; Tom Stevenson; Victor Wang

Archive | 2008

Film adhesive for semiconductor vacuum processing apparatus

Dean J. Larson; Tom Stevenson; Victor Wang

Archive | 2009

Plasma processing chamber with guard ring for upper electrode assembly

Dean J. Larson; Daniel Arthur Brown; Saurabh Ullal

Archive | 2007

Quartz guard ring centering features

Dean J. Larson; Daniel Arthur Brown; Keith Comendant; Victor Wang

Archive | 2007

Quartz guard ring

Dean J. Larson; Daniel Arthur Brown; Saurabh Ullal

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William M. Denty

Lam Research

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Babak Kadkhodayan

Lam Research

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Bi-Ming Yen

Lam Research

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Di Wu

Lam Research

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Kenji Takeshita

Lam Research

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Peter Loewenhardt

Lam Research

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Victor Wang

Lam Research

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Xingcai Su

Lam Research

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Daniel Arthur Brown

Lam Research

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Thomas R. Sutton

Lam Research

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