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Dieter Zernickel

Mattson Technology, Inc.

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Publication

Featured researches published by Dieter Zernickel.

Archive | 1997

Rapid thermal processing (RTP) system with gas driven rotating substrate

Helmut Aschner; Andreas Hauke; Ulrich Walk; Dieter Zernickel

Archive | 2001

Localized heating and cooling of substrates

Sohaila Shooshtarian; Narasimha Acharya; Mike Elbert; Andreas Tillmann; Dieter Zernickel

Archive | 1998

Gas driven rotating susceptor for rapid thermal processing (rtp) system

Helmut Aschner; Andreas Hauke; Karsten Weber; Dieter Zernickel

Archive | 1998

INFLATABLE ELASTOMERIC ELEMENT FOR RAPID THERMAL PROCESSING (RTP) SYSTEM

Helmut Aschner; Helmut Merkle; Ulrich Walk; Dieter Zernickel

Archive | 1999

Method and device for the heat treatment of substrates

Helmut Aschner; Patrick Schmid; Dieter Zernickel

Archive | 1999

Method and apparatus device for the heat treatment of substrates

Helmut Aschner; Patrick Schmid; Dieter Zernickel

Archive | 1998

Apparatus and method for heat treatment of substrates, in particular, semiconductor wafers

Patrick Schmid; Dieter Zernickel; Helmut Aschner

Archive | 2016

Retainer, Method For Producing Same And Use Thereof

Hans-Peter Voelk; Alexander Piechulla; Ulrich Walk; Jens-uwe Fuchs; Dieter Zernickel

Archive | 2014

Haltevorrichtung, verfahren zu deren herstellung und verwendung derselben

Hans-Peter Völk; Alexander Piechulla; Ulrich Walk; Jens-uwe Fuchs; Dieter Zernickel

Archive | 2001

Örtliche erwärmung und kühlung von substraten

Narasimha Sunnyvale Acharya; Mike Elbert; Sohaila Shooshtarian; Andreas Tillman; Dieter Zernickel

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Helmut Aschner

Mattson Technology

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Andreas Hauke

Mattson Technology

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Karsten Weber

Mattson Technology

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Mike Elbert

Mattson Technology

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Sohaila Shooshtarian

Mattson Technology

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Narasimha Acharya

Mattson Technology

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Andreas Tillmann

Mattson Technology

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Hans-Peter Voelk

Centrotherm Photovoltaics

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