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Helmut Aschner

Mattson Technology, Inc.

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Publication

Featured researches published by Helmut Aschner.

Archive | 1997

Rapid thermal processing (RTP) system with gas driven rotating substrate

Helmut Aschner; Andreas Hauke; Ulrich Walk; Dieter Zernickel

Archive | 1998

Gas driven rotating susceptor for rapid thermal processing (rtp) system

Helmut Aschner; Andreas Hauke; Karsten Weber; Dieter Zernickel

Archive | 1998

INFLATABLE ELASTOMERIC ELEMENT FOR RAPID THERMAL PROCESSING (RTP) SYSTEM

Helmut Aschner; Helmut Merkle; Ulrich Walk; Dieter Zernickel

Archive | 2006

Device and method for the reduction of particles in the thermal treatment of rotating substrates

Helmut Aschner; Patrick Schmid; Thomas Theiler; Ottmar Heudorfer; Karsten Weber; Conor Patrick O'carroll

Archive | 1999

Method and device for the heat treatment of substrates

Helmut Aschner; Patrick Schmid; Dieter Zernickel

Archive | 1999

Method and apparatus device for the heat treatment of substrates

Helmut Aschner; Patrick Schmid; Dieter Zernickel

Archive | 1998

Apparatus and method for heat treatment of substrates, in particular, semiconductor wafers

Patrick Schmid; Dieter Zernickel; Helmut Aschner

Archive | 2005

Process chamber for heating rotating semiconductor wafers, for dosing, has a dividing wall giving part-chambers for the wafer and the rotating unit with prevention of particle deposition on the wafer

Helmut Aschner; Patrick Schmid; Thomas Theiler

Archive | 2005

Vorrichtung und Verfahren zur Reduktion von Partikeln bei der thermischen Behandlung rotierender Substrate

Helmut Aschner; Patrick Schmid; Thomas Theiler

Archive | 2005

Vorrichtung und Verfahren zur Reduktion von Partikeln bei der thermischen Behandlung rotierender Substrate Device and method for reduction of particles in the thermal treatment rotating substrates

Helmut Aschner; Patrick Schmid; Thomas Theiler

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Dieter Zernickel

Mattson Technology

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Andreas Hauke

Mattson Technology

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Karsten Weber

Mattson Technology

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Patrick Schmid

Mattson Technology

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Thomas Theiler

Mattson Technology

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Conor Patrick O'carroll

Mattson Technology

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