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Dodoc Aurelian

Carl Zeiss AG

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Archive | 2010

Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv

Paul Hans-Jochen; Braun Gerhard; Migura Sascha; Dodoc Aurelian; Zaczek Christoph

Archive | 2009

Projection exposure apparatus for semiconductor lithography comprising a device for the thermal manipulation of an optical element

Hauf Markus; Bleidistel Sascha; Migura Sascha; Mann Hans-Juergen; Enkisch Hartmut; Zellner Johannes; Schottner Michael; Kraehmer Daniel; Totzeck Michael; Dodoc Aurelian; Hetzler Jochen; Beierl Helmut; Ulrich Wilhelm

Archive | 2011

Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Beleuchtungsoptik zur Ausleuchtung eines Objektfeldes

Mann Hans-Juergen; Zellner Johannes; Dodoc Aurelian; Pretorius Marco; Menke Christoph; Endres Martin; Wilhelm Ulrich

Archive | 2010

Projection optics for use in projection exposure apparatus utilized for producing e.g. microchip, has beam path formed between object field and mirror and another beam path formed after another mirror, where paths intersect each other

Dodoc Aurelian

Archive | 2005

REFRACTIVE PROJECTION OBJECTIVE LENS FOR IMMERSION LITHOGRAPHY

Rostalski Hans-Juergen; Dodoc Aurelian; Epple Alexander; Beierl Helmut

Archive | 2005

Refractive projection objective for immersion lithography, projection exposure apparatus comprising such a projection objective, and device manufacturing method using such a projection objective

Rostalski Hans-Juergen; Dodoc Aurelian; Epple Alexander; Beierl Helmut

Archive | 2016

Catadioptric projection objective lens having intermediate image

Dodoc Aurelian; Ulrich Wilhelm; Epple Alexander

Archive | 2015

PROJECTION OBJECTIVE HAVING HIDDEN PUPIL FOR MICROLITHOGRAPHY

Daniel Cramer; Dodoc Aurelian; Hans-Juergen Mann; Toralf Gruner

Archive | 2015

IMAGING OPTICS AND PROJECTION EXPOSURE DEVICE FOR MICROLITHOGRAPHY WITH IMAGING OPTICS OF THIS TYPE

Johannes Zellner; Dodoc Aurelian; Marco Pretorius; Christoph Menke; Wilhelm Ulrich; Hans-Juergen Mann

Archive | 2015

Makrolinsensystem und Abbildungsvorrichtung

Tomioka Ryoko; Saito Hiroki; Dodoc Aurelian; Pollmann Michael; Klein Jürgen

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Epple Alexander

Carl Zeiss AG

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Ulrich Wilhelm

Carl Zeiss AG

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Beierl Helmut

Carl Zeiss AG

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Mann Hans-Juergen

Carl Zeiss AG

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Hans-Juergen Mann

Carl Zeiss AG

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Wilhelm Ulrich

Carl Zeiss AG

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Bleidistel Sascha

Carl Zeiss AG

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Christoph Menke

Carl Zeiss AG

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Johannes Zellner

Carl Zeiss AG

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Marco Pretorius

Carl Zeiss AG

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