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Dive into the research topics where Johannes Zellner is active.

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Featured researches published by Johannes Zellner.


Archive | 2006

Simulation and error budget for high precision interferometry

Johannes Zellner; Bernd Dörband; Heiko Feldmann

An accurate calculation of the error budget of individual interferometer components can only be based on a simulation of the total interferometric setup. We have shown that such a simulation can in fact make accurate predictions of the achievable measurement precision. Furthermore, a simulation allows calculating the maximal allowable drifts magnitudes. Using a simulation of the interferometric setup therefore allows for focusing on critical components and drifts on the one hand and for relaxing requirements for non-critical components and drifts on the other hand.


Archive | 2003

Euv projection lens with mirrors made from materials with differing signs for the rise in temperature dependence of the thermal expansion coefficient around the zero transition temperature

Udo Dinger; Frank Eisert; Stefan Koehler; Andreas Ochse; Johannes Zellner; Martin Lowisch; Timo Laufer


Archive | 2010

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

Johannes Zellner; Hans-Juergen Mann; Martin Endres


Archive | 2007

SYMMETRICAL OBJECTIVE HAVING FOUR LENS GROUPS FOR MICROLITHOGRAPHY

Gerhard Fürter; Ulrich Löring; Daniel Krähmer; Aurelian Dodoc; Heiko Feldmann; David Shafer; Wilhelm Ulrich; Holger Walter; Johannes Zellner


Archive | 2005

Projection exposure apparatus and projection optical system

Jean-Noel Fehr; Hans-Juergen Mann; Johannes Zellner


Archive | 2010

IMAGING OPTICS AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOGRAPHY WITH AN IMAGING OPTICS OF THIS TYPE

Hans-Juergen Mann; Johannes Zellner; Aurelian Dodoc; Claus Zahlten; Christoph Menke; Marco Pretorius; Wilhelm Ulrich; Hans-Juergen Rostalski


Archive | 2004

Optical component, comprising a material with a predetermined homogeneity of thermal expansion

Timo Laufer; Johannes Zellner


Archive | 2011

Imaging optical system and illumination optical system

Hans-Juergen Mann; Johannes Zellner; Aurelian Dodoc; Marco Pretorius; Christoph Menke; Wilhelm Ulrich; Martin Endres


Archive | 2014

Microlithographic imaging optical system including multiple mirrors

Hans-Juergen Mann; Armin Schoeppach; Johannes Zellner


Archive | 2011

Imaging optics and projection exposure installation for microlithography with an imaging optics

Hans-Juergen Mann; Johannes Zellner; Aurelian Dodoc; Claus Zahlten; Christoph Menke; Marco Pretorius; Wilhelm Ulrich; Hans-Juergen Rostalski

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