Douglas R. Mcallister

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Featured researches published by Douglas R. Mcallister.

Archive | 2004

Retaining ring with shaped surface

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Jian Lin; Stacy Meyer; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Daniel Cam Toan Lu; Romain Beau De Lamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong

Archive | 2001

Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system

Matthew Fenton Davis; Douglas R. Mcallister; David Evans

Archive | 2007

Composite retaining ring

Jeonghoon Oh; Hung Chih Chen; Thomas Brezoczky; Douglas R. Mcallister; David Datong Huo

Archive | 2009

Self cleaning and adjustable slurry delivery arm

Jamie Stuart Leighton; Abhijit Desai; Douglas R. Mcallister

Archive | 2017

SEMICONDUCTOR PROCESSING CHAMBER

Aaron Muir Hunter; Mehran Behdjat; Niraj Merchant; Douglas R. Mcallister; Dongming Iu; Kong Lung Chan; Lara Hawrylchak

Archive | 2005

Attaching components of a carrier head

Trung T. Doan; Jeffrey Schmidt; Douglas R. Mcallister; Stacy Meyer

Archive | 2014

RTP lamp base with removal features

Joseph M. Ranish; Douglas R. Mcallister

Archive | 2014

Rtp lamp base improvement

Joseph M. Ranish; Douglas R. Mcallister

Archive | 2004

Retaining ring with convex bottom surface

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Stacy Meyer; Jian Lin; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Daniel Cam Toan Lu; Romain Beau Delamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong

Archive | 2004

Haltering mit geformter fläche Retaining ring shaped area

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Stacy Meyer; Jian Lin; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Danny Cam Toan Lu; Romain Beau Delamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong

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