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Dive into the research topics where Trung T. Doan is active.

Publication


Featured researches published by Trung T. Doan.


Archive | 2004

Polishing pad conditioner and methods of manufacture and recycling

Trung T. Doan; Venkata R. Balagani; Kenny King-Tai Ngan


Archive | 2004

Profile detection and refurbishment of deposition targets

Kenneth Tsai; Kenny King-Tai Ngan; Trung T. Doan


Archive | 2004

Refurbishment of sputtering targets

Trung T. Doan; Kenny King-Tai Ngan


Archive | 2004

Retaining ring with shaped surface

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Jian Lin; Stacy Meyer; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Daniel Cam Toan Lu; Romain Beau De Lamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong


Archive | 2004

Coating for aluminum component

Trung T. Doan; Kenny King-Tai Ngan


Archive | 1993

Planarization apparatus and method for performing a planarization operation

Mark E. Tuttle; Trung T. Doan; Angus C. Fox; Gurtej S. Sandhu; Hugh E. Stroupe


Archive | 2005

Chamber components with polymer coatings and methods of manufacture

Laxman Murugesh; Trung T. Doan


Archive | 2005

Attaching components of a carrier head

Trung T. Doan; Jeffrey Schmidt; Douglas R. Mcallister; Stacy Meyer


Archive | 2006

Elements de chambre pourvus d'enrobages polymeres et procedes de fabrication correspondants

Laxman Murugesh; Trung T. Doan


Archive | 2005

Remise a neuf de cibles de pulverisation

Trung T. Doan; Kenny King-Tai Ngan

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