Charles C. Garretson | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Charles C. Garretson is active.

Explore More

Publication

Featured researches published by Charles C. Garretson.

advanced semiconductor manufacturing conference | 2010

Method for improved CMP pad conditioning performance

Gregory E. Menk; Sivakumar Dhandapani; Charles C. Garretson; Shou-sung Chang; Jason Garcheung Fung; Stan D. Tsai

A new pad conditioning arm design enables the use of closed-loop control (CLC) to improve conditioning performance throughout the life of a pad and disk pair. Measured pad conditioner torque is used to monitor and control the conditioning and polish processes in situ and in real time. The CLC system maintains process performance throughout pad life by adjusting the conditioner down force to compensate for process drift, such as the loss of diamond aggressiveness as the disk ages.

Archive | 1998

Method of post CMP defect stability improvement

Boris Fishkin; Charles C. Garretson; Peter McKeever; Thomas H. Osterheld; Gopalakrishna B. Prabhu; Doyle E. Bennett; Benjamin A. Bonner; Sidney P. Huey

Archive | 2004

Retaining ring with shaped surface

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Jian Lin; Stacy Meyer; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Daniel Cam Toan Lu; Romain Beau De Lamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong

Archive | 2000