E. J. O’Sullivan

Exchange-biased magnetic tunnel junctions and application to nonvolatile magnetic random access memory (invited)

Exchange biased magnetic tunnel junction (MTJ) structures are shown to have useful properties for forming magnetic memory storage elements in a novel cross-point architecture. MTJ elements have been developed which exhibit very large magnetoresistive (MR) values exceeding 40% at room temperature, with specific resistance values ranging down to as little as ∼60 Ω(μm)2, and with MR values enhanced by moderate thermal treatments. Large MR values are observed in magnetic elements with areas as small as 0.17 (μm)2. The magnetic field dependent current–voltage characteristics of an MTJ element integrated with a silicon diode are analyzed to extract the MR properties of the MTJ element itself.

Spin torque switching of perpendicular Ta∣CoFeB∣MgO-based magnetic tunnel junctions

Spin torque switching is investigated in perpendicular magnetic tunnel junctions using Ta∣CoFeB∣MgO free layers and a synthetic antiferromagnet reference layer. We show that the Ta∣CoFeB interface makes a key contribution to the perpendicular anisotropy. The quasistatic phase diagram for switching under applied field and voltage is reported. Low switching voltages, Vc 50 ns=290 mV are obtained, in the range required for spin torque magnetic random access memory. Switching down to 1 ns is reported, with a rise in switching speed from increased overdrive that is eight times greater than for comparable in-plane devices, consistent with expectations from a single-domain model.

Spin torque switching of 20 nm magnetic tunnel junctions with perpendicular anisotropy

Spin-transfer torque magnetic random access memory (STT-MRAM) is one of the most promising emerging non-volatile memory technologies. MRAM has so far been demonstrated with a unique combination of density, speed, and non-volatility in a single chip, however, without the capability to replace any single mainstream memory. In this paper, we demonstrate the basic physics of spin torque switching in 20 nm diameter magnetic tunnel junctions with perpendicular magnetic anisotropy materials. This deep scaling capability clearly indicates the STT MRAM device itself may be suitable for integration at much higher densities than previously proven.

Y1Ba2Cu3O7−δ thin films grown by a simple spray deposition technique

The preparation of high Tc superconducting thin films of Y1Ba2Cu3O7−δ on (100) single crystals of MgO, ZrO2 with 9% Y2O3 (yttria stabilized zirconia, or YSZ), and SrTiO3 using a simple spray deposition technique is described. Typical film growth procedure involves (a) the spraying of a stoichiometric solution of the nitrate precursors on the heated substrate (180 °C), (b) prebaking in air of the sprayed film (20 min at 500 °C), and (c) oven annealing of the film under flowing O2 (900–950 °C followed by slow cooling to 200 °C in about 3 h). X‐ray diffraction analysis of the films after each of the growing steps mentioned above shows primarily the presence of crystalline phases of the nitrates, the oxides, and the orthorhombic superconducting phase, respectively. Resistivity versus temperature measurements show that the onset and completion of the superconductive transition occur at 92 and 87 K, respectively, in films on YSZ substrate; at 95 and 80 K, respectively, in films on SrTiO3 substrate; and at 82 an...The preparation of high T/sub c/ superconducting thin films of Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-//sub delta/ on (100) single crystals of MgO, ZrO/sub 2/ with 9% Y/sub 2/O/sub 3/ (yttria stabilized zirconia, or YSZ), and SrTiO/sub 3/ using a simple spray deposition technique is described. Typical film growth procedure involves (a) the spraying of a stoichiometric solution of the nitrate precursors on the heated substrate (180 /sup 0/C), (b) prebaking in air of the sprayed film (20 min at 500 /sup 0/C), and (c) oven annealing of the film under flowing O/sub 2/ (900--950 /sup 0/C followed by slow cooling to 200 /sup 0/C in about 3 h). X-ray diffraction analysis of the films after each of the growing steps mentioned above shows primarily the presence of crystalline phases of the nitrates, the oxides, and the orthorhombic superconducting phase, respectively. Resistivity versus temperature measurements show that the onset and completion of the superconductive transition occur at 92 and 87 K, respectively, in films on YSZ substrate; at 95 and 80 K, respectively, in films on SrTiO/sub 3/ substrate; and at 82 and 77 K, respectively, in films on MgO substrate.

A three-terminal spin-torque-driven magnetic switch

A three-terminal spin-torque-driven magnetic switch is experimentally demonstrated. The device uses nonlocal spin current and spin accumulation as the main mechanism for current-driven magnetic switching. It separates the current-induced write operation from that of a magnetic tunnel junction based read. The write current only passes through metallic structures, improving device reliability. The device structure makes efficient use of lithography capabilities, important for robust process integration.

Study of oxygen transport in Ba2YCu3O7−δ using a solid-state electrochemical cell

A solid‐state electrochemical oxygen concentration cell with yttria‐stabilized zirconia (YSZ) as electrolyte was employed to study oxygen transport in Ba2YCu3O7−δ . On one side of the YSZ [a single‐crystal wafer oriented in the (100) plane], reference and counter electrodes were fabricated from sputtered Au. A ceramic pellet of Ba2YCu3O7−δ was pressed against the other side of the electrolyte. Using this cell, it was possible to electrochemically drive oxygen into and out of the Ba2YCu3O7−δ oxide electrode under controlled conditions. Current versus time and open circuit potential recovery data were analyzed according to various models. The diffusivity of oxygen in 94% dense Ba2YCu3O7−δ was estimated to ≂5×10−8 cm2 s−1 at 550 °C.

High-bias backhopping in nanosecond time-domain spin-torque switches of MgO-based magnetic tunnel junctions

For CoFeB∕MgO-based magnetic tunnel junctions, the switching probability has an unusual dependence on bias voltage V and bias magnetic field H for bias voltage pulse durations t long enough to allow thermally activated reversal. At high junction bias close to 1V, the probability of magnetic switching in spin-torque-driven switches sometimes appears to decrease. This is shown to be due to a backhopping behavior occurring at high bias, and it is asymmetric in bias voltage, being more pronounced in the bias direction for antiparallel-to-parallel spin-torque switch, i.e., in the direction of electrons tunneling into the free layer. This asymmetry hints at processes involving hot electrons within the free-layer nanomagnet.

Integrated on-chip inductors with electroplated magnetic yokes (invited)

Thin-film ferromagnetic inductors show great potential as the energy storage element for integrated circuits containing on-chip power management. In order to achieve the high energy storage required for power management, on-chip inductors require relatively thick magnetic yoke materials (several microns or more), which can be readily deposited by electroplating through a photoresist mask as demonstrated in this paper, the yoke material of choice being Ni45Fe55, whose properties of relatively high moment and electrical resistivity make it an attractive model yoke material for inductors. Inductors were designed with a variety of yoke geometries, and included both single-turn and multi-turn coil designs, which were fabricated on 200 mm silicon wafers in a CMOS back-end-of-line (BEOL) facility. Each inductor consisted of electroplated copper coils enclosed by the electroplated Ni45Fe55 yokes; aspects of the fabrication of the inductors are discussed. Magnetic properties of the electroplated yoke materials are...

Observation of magnetic switching in submicron magnetic-tunnel junctions at low frequency

Understanding the magnetic switching behavior in micron and submicron scale specimens is important for a number of applications. In this study, magnetic-tunnel junctions of various sizes and shapes were fabricated and their switching behavior was studied in detail. Using exchange bias to offset the magnetic response of one electrode, the response of the other (free) electrode was determined from measurements of junction resistance. Switching threshold curves were measured by sweeping magnetic fields in both easy and hard direction. Single domain like switching was observed in some of our smallest submicron junctions. The observed behavior was compared with predictions from the Stoner–Wohlfarth rotational model and from numerical calculations.

Fabrication and characterization of MgO-based magnetic tunnel junctions for spin momentum transfer switching

Current-induced spin-torque switching was demonstrated on sub-100 nm magnetic tunnel junction devices fabricated on 200 mm substrates utilizing 180 nm complimentary metal–oxide–semiconductor back-end-of-the-line (BEOL) technology. Low resistance-area (RA) product and high tunneling magnetoresistance (TMR) were achieved by using substrates containing a CoFeB free layer and a thin MgO barrier. To obtain the desired sub-100 nm features, photoresist trimming was applied on patterns created by a 248 nm lithography tool. Furthermore, the magnetic stack was defined using an ion beam etch that stopped on the thin MgO barrier. Field-sweep measurements on elliptical devices that are 80 nm wide and 160 nm long indicated RA∼4 Ω μm2 and TMR∼90%. Upon injecting current into the devices while applying an external offset field of 28 Oe, current-induced switching occurred from parallel (P) to antiparallel (AP) state at +1.3 mA, and from AP to P state at −1.25 mA. BEOL process integration on 200 mm substrates enabled stati...