Eric O. Green

Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same

Determination of a process flow based upon fault detection analysis

Process control based on tool health data

Updating process controller based upon fault detection analysis

Determining the health of a desired node in a multi-level system

Determining a next tool state based on fault detection information

Fault detection spanning multiple processes

Process control at an interconnect level

Method and apparatus for system state classification

Methods of controlling gate electrode doping, and systems for accomplishing same