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Dive into the research topics where Robert J. Chong is active.

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Featured researches published by Robert J. Chong.


IFAC Proceedings Volumes | 2006

PERFORMANCE ASSESSMENT OF RUN-TO-RUN EWMA CONTROLLERS

Amogh V. Prabhu; Thomas F. Edgar; Robert J. Chong

An iterative method is developed to optimize a performance criterion for best achievable performance for discrete integral controllers used in run-to-run control. An analytical expression is derived so that a realistic assessment of the given integral controller is obtained. Using the theoretical equivalence of discrete integral and exponentially weighted moving average (EWMA) controllers, the method is then extended to performance assessment of EWMA controllers. A semiconductor manufacturing example is used to illustrate the utility of the method.


Archive | 2002

Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same

Howard E. Castle; Robert J. Chong; Brian K. Cusson; Eric O. Green


Archive | 2001

Acoustically enhanced deposition processes, and systems for performing same

Robert J. Chong


Archive | 2002

Method and apparatus for controlling a fabrication process based on a measured electrical characteristic

Robert J. Chong; Jin Wang


Proceedings of SPIE | 2007

Lithography process control using scatterometry metrology and semi-physical modeling

Kevin R. Lensing; Jason P. Cain; Amogh Prabhu; Alok Vaid; Robert J. Chong; Richard Good; Bruno M. LaFontaine; Oleg Kritsun


Archive | 2002

Process control based on tool health data

Robert J. Chong; Eric O. Green; Jin Wang


Archive | 2002

Method and apparatus for dynamically monitoring controller tuning parameters

Robert J. Chong; Alexander J. Pasadyn; Thomas J. Sonderman


Archive | 2002

Updating process controller based upon fault detection analysis

Eric O. Green; Matthew A. Purdy; Elfido Coss; Christopher A. Bode; Robert J. Chong; Gregory A. Cherry


Archive | 2001

Process control based upon weight or mass measurements, and systems for accomplishing same

Richard J. Markle; Robert J. Chong


Archive | 2003

Method and apparatus for modifying design constraints based on observed performance

Richard J. Markle; Robert J. Chong; Alexander J. Pasadyn

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Alexander J. Pasadyn

University of Texas at Austin

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