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Erwin Hammerl

IBM

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Publication

Featured researches published by Erwin Hammerl.

Archive | 1994

Shallow trench isolation with thin nitride liner

Paul Martin Fahey; Erwin Hammerl; Herbert L. Ho; Mutsuo Morikado

Archive | 1997

Shallow trench isolation with oxide-nitride/oxynitride liner

John Benedict; David M. Dobuzinsky; Philip L. Flaitz; Erwin Hammerl; Herbert L. Ho; James F. Moseman; Herbert Palm; Seiko Yoshida; Hiroshi Takato

Archive | 1996

Controlled recrystallization of buried strap in a semiconductor memory device

Erwin Hammerl; Jack A. Mandelman; Herbert L. Ho; Junichi Shiozawa; Reinhard Stengl

Archive | 1996

Application of thin crystalline Si3 N4 liners in shallow trench isolation (STI) structures

Herbert L. Ho; Erwin Hammerl; David M. Dobuzinsky; J Herbert Palm; Stephen Fugardi; Atul C. Ajmera; James F. Moseman; Samuel C. Ramac

Archive | 1996

Buried strap formation in a DRAM trench capacitor

Reinhard Stengl; Erwin Hammerl; Herbert L. Ho; Jack A. Mandelman; Radhika Srinivasan; Alvin P. Short

Archive | 1999

Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications

Farid Agahi; Gary B. Bronner; Bertrand Flietner; Erwin Hammerl; Herbert L. Ho; Radhika Srinivasan

Archive | 1996

Storage node process for deep trench-based DRAM

Herbert L. Ho; Radhika Srinivasan; Scott Halle; Erwin Hammerl; David M. Dobuzinsky; Jack A. Mandelman; Mark A. Jaso

Archive | 1996

Nitride cap formation in a DRAM trench capacitor

Erwin Hammerl; Herbert L. Ho

Archive | 1996

Three-dimensional device layout with sub-groundrule features

Reinhard Stengl; Erwin Hammerl; Jack A. Mandelman; Herbert L. Ho; Radhika Srinivasan; Alvin P. Short; Bernhard Poschenrieder

Archive | 1996

Three-dimensional device layout having a trench capacitor

Erwin Hammerl; Jack A. Mandelman; Bernhard Poschenrieder; Alvin P. Short; Radhika Srinivasan; Reinhard Stengl; Herbert L. Ho

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Herbert L. Ho

IBM

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Radhika Srinivasan

IBM

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David M. Dobuzinsky

IBM

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Jack A. Mandelman

IBM

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Herbert L. Ho

IBM

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Samuel C. Ramac

IBM

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Stephen Fugardi

IBM

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Alvin P. Short

IBM

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Atul C. Ajmera

IBM

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J Herbert Palm

IBM

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