Foua Vang

Cost effective 28nm LP SoC technology optimized with circuit/device/process co-design for smart mobile devices

With newer technology nodes, circuit/device/process codesign is essential to realize the advantages of scaling. Leveraging co-design approach based on a well-established manufacturing flow, a cost effective 28 nm 4G SOC technology has been crafted. This 28 nm design strategy uses two sets of design rules and 7 different Vt cells with optimal power gating to achieve a 2.4× increase in gate density, 55% decrease in power and 30% gain in frequency with respect to the 45 nm counterpart. Relevant technical tradeoffs between the design/technology interactions are discussed to illustrate the codesign aspects.

Cost and power/performance optimized 20nm SoC technology for advanced mobile devices

A cost competitive 20nm technology node is described that enabled industry-first 20nm cellular modem chip with 2× peak data rates vs 28nm, and 2× carrier aggregation. Process and design enhancements for layout context optimization, and continuous process improvements resulted in 18% boost in circuit performance while simultaneously achieving >30% power reduction. 3 mask local interconnect and 64nm double patterning lower level metals - with yield-friendly single color pitch of 95nm and M1 special constructs with 90nm (=gate pitch) single color pitch for cell abutment - were used for achieving ~2× gate density. Single patterning 80nm pitch metal for routing levels was optimized for both density and performance. Active/passive device and double pattern metal mask count was optimized to reach process should-cost goals. Resulting technology provides cost reduction vs 28 HKMG per close to historical trend, and also cost-competitiveness vs 28 PolySiON. Leveraging of yield learning of this common back-end metallization results in up to 6 month pull-in of 16nm Finfet node yield ramp.