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Dive into the research topics where Francimar Schmitt is active.

Publication


Featured researches published by Francimar Schmitt.


Archive | 2004

Method of improving interlayer adhesion

Francimar Schmitt; Li-Qun Xia; Son Van Nguyen; Shankar Venkataraman


Archive | 2007

Method for forming an ultra low dielectric film by forming an organosilicon matrix and large porogens as a template for increased porosity

Francimar Schmitt; Hichem M'Saad


Archive | 2004

Deposition of low dielectric constant films by N2O addition

Francimar Schmitt; Kimberly Branshaw; Padmanabhan Krishnaraj; Hichem M'Saad


Archive | 2005

Low temperature process to produce low-K dielectrics with low stress by plasma-enhanced chemical vapor deposition (PECVD)

Kang Sub Yim; Lihua Li Huang; Francimar Schmitt; Li-Qun Xia


Archive | 2005

Multi-stage curing of low k nano-porous films

Francimar Schmitt; Yi Zheng; Kang Sub Yim; Sang H. Ahn; Lester A. D'Cruz; Dustin W. Ho; Alexandros T. Demos; Li-Qun Xia; Hichem M'Saad


Archive | 2007

PROCESS AND APPARATUS FOR POST DEPOSITION TREATMENT OF LOW DIELECTRIC MATERIALS

Francimar Schmitt


Archive | 2005

Techniques promoting adhesion of porous low K film to underlying barrier layer

Francimar Schmitt; Alexandros T. Demos; Hichem M'Sadd; Sang H. Ahn; Lester A. D'Cruz; Khaled A. Elsheref; Zhenjiang Cui


Archive | 2007

Overall defect reduction for PECVD films

Annamalai Lakshmanan; Vu Nt Nguyen; Sohyun Park; Ganesh Balasubramanian; Steven Reiter; Tsutomu Kiyohara; Francimar Schmitt; Bok Hoen Kim


Archive | 2007

Method of modifying interlayer adhesion

Francimar Schmitt; Li-Qun Xia; Son Van Nguyen; Shankar Venkataraman


Archive | 2008

UV CURING OF PECVD-DEPOSITED SACRIFICIAL POLYMER FILMS FOR AIR-GAP ILD

Atif Noori; Francimar Schmitt; Annamalai Lakshmanan; Bok Hoen Kim; Reza Arghavani

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