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Frank Mauersberger

Advanced Micro Devices

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Publication

Featured researches published by Frank Mauersberger.

Archive | 2001

Method for forming copper interconnects

John A. Iacoponi; Paul R. Besser; Frederick N. Hause; Frank Mauersberger; Errol Todd Ryan; William S. Brennan; Peter J. Beckage

Archive | 2003

Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric

Hartmut Ruelke; Joerg Hohage; Thomas Werner; Frank Mauersberger

Archive | 2001

Method for forming openings for conductive interconnects

Frederick N. Hause; Paul R. Besser; Frank Mauersberger; Errol Todd Ryan; William S. Brennan; John A. Iacoponi; Peter J. Beckage

Archive | 2000

Contact each methodology and integration scheme

Paul R. Besser; Errol Todd Ryan; Frederick N. Hause; Frank Mauersberger; William S. Brennan; John A. Iacoponi; Peter J. Beckage

Archive | 2005

Method for forming a defined recess in a damascene structure using a CMP process and a damascene structure

Gerd Marxsen; Frank Mauersberger; Rico Hueselitz

Archive | 2002

Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques

Frank Mauersberger; Peter J. Beckage; Paul R. Besser; Frederick N. Hause; Errol Todd Ryan; William S. Brennan; John A. Iacoponi

Archive | 2003

Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process

Gerd Marxsen; Axel Preusse; Markus Nopper; Frank Mauersberger

Archive | 2001

Test structure for providing depth of polish feedback

Frederick N. Hause; Paul R. Besser; Frank Mauersberger; Errol Todd Ryan; William S. Brennan; John A. Iacoponi; Peter J. Beckage

Archive | 2002

Verfahren zur Herstellung einer Deckschicht mit antireflektierenden Eigenschaften auf einem Dielektrikum mit kleinem ε

Hartmut Ruelke; Joerg Hohage; Thomas Werner; Frank Mauersberger

Archive | 2009

Method of depositing metal, forming metalization layer and improving evenness of CMP process

Gerd Marxsen; Axel Preusse; Markus Nopper; Frank Mauersberger

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Gerd Marxsen

Advanced Micro Devices

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Errol Todd Ryan

Advanced Micro Devices

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Frederick N. Hause

Advanced Micro Devices

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John A. Iacoponi

Advanced Micro Devices

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Peter J. Beckage

Advanced Micro Devices

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William S. Brennan

Advanced Micro Devices

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Paul R. Besser

Applied Materials

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Rico Hueselitz

Advanced Micro Devices

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Axel Preusse

GlobalFoundries

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Markus Nopper

GlobalFoundries

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