Gerardo Delgadino
Lam Research
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Publication
Featured researches published by Gerardo Delgadino.
Solid State Phenomena | 2016
Alexander Kabansky; Glenn Westwood; Samantha Tan; Frederic Kovacs; David Lou; Joe Han; Gerardo Delgadino; H.W. Chang
For advanced technology nodes TiN hard mask integration into Cu/low-k via/trench DD process requires the mask to be fully stripped after DD etching. The one-step H2O2 containing wet chemical clean aiming to removing TiN mask often failed to simultaneously clean etch residue. We developed more reliable two-step wet chemical process combining a solvent-based post-etch residue clean followed by a solvent/H2O2 mixture strip for TiN mask removal. Bath lifetime optimization was also demonstrated.
Archive | 2011
Rajinder Dhindsa; Alexei Marakhtanov; Gerardo Delgadino; Eric Hudson; Bi Ming Yen; Andrew D. Bailey
Archive | 2008
Gerardo Delgadino; Robert C. Hefty
224th ECS Meeting (October 27 – November 1, 2013) | 2013
Alexander Kabansky; Samantha Tan; Eric Hudson; Gerardo Delgadino; Lajos Gancs; Jeffrey Marks
Archive | 2015
Reza Arghavani; Shashank C. Deshmukh; Eric Hudson; Tom Kamp; Samantha Tan; Gerardo Delgadino
Archive | 2013
John M. Nagarah; Gerardo Delgadino
Archive | 2012
Alexei Marakhtanov; Rajinder Dhindsa; Ryan Bise; Lumin Li; Sang Ki Nam; James Rogers; Eric Hudson; Gerardo Delgadino; Andrew D. Bailey; Mike Kellogg; Anthony de la Llera
Archive | 2010
Bing Ji; Kenji Takeshita; Andrew D. Bailey; Eric Hudson; Maryam Moravej; Stephen M. Sirard; Jungmin Ko; Daniel Le; Robert C. Hefty; Yu Cheng; Gerardo Delgadino; Bi-Ming Yen
Archive | 2017
Xin Zhang; Alan J. Jensen; Gerardo Delgadino; Daniel Le
Archive | 2016
Paul Raymond Besser; Bart van Schravendijk; Yoshie Kimura; Gerardo Delgadino; Harald Orkorn-schmidt; Dengliang Yang
